Unlock instant, AI-driven research and patent intelligence for your innovation.

A device and application for preparing nitrogen trifluoride gas

A technology of nitrogen trifluoride and gas, which is applied in the field of preparing nitrogen trifluoride gas, can solve problems such as the reduction of electrolysis efficiency and affect the health of employees, achieve continuous electrolysis, reduce manual high-temperature and toxic operations, and realize the effect of automation

Active Publication Date: 2017-10-13
PERIC SPECIAL GASES CO LTD
View PDF6 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The above three situations require the existing electrolytic preparation of NF 3 In the process of gas, there are artificially synthesized electrolyte process, artificially added electrolyte process and water removal process, and in the electrolytic preparation of NF 3 During the electrolysis cycle of the gas, it is necessary to manually replenish the electrolyte and remove the water.
This will have the following problems: (1) The process of synthesizing and adding electrolyte is a high-temperature and toxic operation, and long-term manual operation will affect the health of employees; NF 3 Gas generation, reduced electrolysis efficiency

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A device and application for preparing nitrogen trifluoride gas

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0069] A kind of preparation NF in this embodiment 3 The reaction kettle 15, the storage tank 16 and the electrolyzer 20 of the device of the gas are the same as the comparative example 2.

[0070] The application steps of the device are as follows:

[0071] (1) Electrolyte synthesis and storage

[0072] When NH 3 NH was detected by tank flow meter 7 and HF tank flow meter 8 respectively 3 and HF cumulative flow reaches 4.7×10 5 L and 1.16×10 6 During L, send signal to automatic control system 11; All the other are with comparative example 3 steps (1).

[0073] (2)NF 3 Electrolysis and replenishment

[0074] With comparative example 2 step (2).

[0075] The electrolysis temperature of the electrolytic cell 20 is 120° C. during the operation period. The electrolysis process of the electrolytic cell 20 is as follows: 1) The electrolysis time is up to 5h under the condition of a voltage of 5.5V, and the gas generated by the anode is measured, NF 3 The volume percentage ...

Embodiment 2

[0077] A kind of preparation NF in this embodiment 3 The reaction kettle 15, the storage tank 16 and the electrolyzer 20 of the device of the gas are the same as the comparative example 2.

[0078] The application steps of the device are as follows:

[0079] (1) Electrolyte synthesis and storage

[0080] NH 3 Storage tank flowmeter 7 and HF storage tank flowmeter 8 respectively adjust NH 3 and HF flow to 220L / min and 585L / min; when NH 3 NH was detected by tank flow meter 7 and HF tank flow meter 8 respectively 3 and HF cumulative flow reaches 4.49×10 5 L and 1.19×10 6 During L, send signal to automation control system 11; In reactor 15, NH 3 Gas reacts with HF gas to form NH 4 F.1.9HF electrolyte; the rest are the same as step (1) of comparative example 3.

[0081] (2)NF 3 Electrolysis and replenishment

[0082] With comparative example 2 step (2).

[0083] The electrolysis temperature of the electrolytic cell 20 is 120° C. during the operation cycle. The electrol...

Embodiment 3

[0085] A kind of preparation NF in this embodiment 3 The reaction kettle 15 of the gas device is the same as Comparative Example 2; the storage tank 16 is a 4000L nickel container, the highest liquid level is 700mm, and the lowest is 100mm; The electrolyte liquid level of tank 20 is the highest 650mm, the lowest is 530mm, and the anode and cathode are nickel plates.

[0086] The application steps of the device are as follows:

[0087] (1) Electrolyte synthesis and storage

[0088] When NH 3 NH was detected by tank flow meter 7 and HF tank flow meter 8 respectively3 and HF cumulative flow reaches 4.7×10 5 L and 1.16×10 5 During L, send signal to automatic control system 11; All the other are with comparative example 3 steps (1).

[0089] (2)NF 3 Electrolysis and replenishment

[0090] When the electrolytic tank level gauge 21 shows a value of 650mm, a signal is sent to the automatic control system 11;

[0091] Electrolytic production of NF 3 During the gasification pro...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to a device and application for preparing nitrogen trifluoride gas, belonging to the field of nitrogen trifluoride preparation. The device Chinese electrolyte synthesis system includes NH3 storage tank, HF storage tank, NH3 storage tank vaporizer, HF storage tank vaporizer, NH3 storage tank automatic valve, HF storage tank automatic valve, NH3 storage tank flowmeter, HF storage tank flowmeter and reactor; electrolyte storage system includes storage tank, automatic valves A, B, storage tank level gauge and flow meter; electrolysis system includes electrolytic tank and electrolytic tank level gauge; nitrogen sweeping system includes N2 tank, N2 tank Pressure gauge, N2 tank automatic valves A and B; the automatic control system is remotely controlled by signals. The applications include electrolyte synthesis and NF3 storage, and NF3 electrolysis and replenishment. The device can realize continuous electrolytic preparation of NF3 gas by automatically adding electrolyte, improve the electrolysis efficiency of the electrolytic cell, and reduce manual high-temperature and toxic operations.

Description

technical field [0001] The invention relates to a device and application for preparing nitrogen trifluoride gas, in particular to an automatic device suitable for electrolytic preparation of nitrogen trifluoride gas and an application method thereof, belonging to the field of nitrogen trifluoride preparation. Background technique [0002] With the rapid development of the electronics industry, nitrogen trifluoride (Nitrogen Trifluoride, referred to as NF 3 ) gas has a wide range of important applications in the electronics industry. In the prior art, the preparation of NF 3 The main method of gas is molten salt electrolysis, the anode is nickel or carbon plate, the cathode is nickel, carbon plate or iron, and the electrolyte is NH 4 F·xHF molten salt, the electrolysis temperature is 90℃~140℃, the anode produces NF 3 , the cathode produces H 2 . In the prior art, the NH 4 There are two main preparation methods for F·xHF molten salt: one is to use NH 4 F·HF and HF are m...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): C25B1/24C25B9/00C25B15/02
Inventor 王斌纪振红马毅斌孟祥军李翔宇冀延治
Owner PERIC SPECIAL GASES CO LTD