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Device for preparing nitrogen trifluoride and application

A nitrogen trifluoride and gas technology, applied in the field of nitrogen trifluoride gas preparation, can solve problems such as reduced electrolysis efficiency and impact on employee health, achieve continuous electrolysis, reduce artificial high-temperature toxic operations, and achieve the effects of automation

Active Publication Date: 2015-09-30
PERIC SPECIAL GASES CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The above three situations require the existing electrolytic preparation of NF 3 In the process of gas, there are artificially synthesized electrolyte process, artificially added electrolyte process and water removal process, and in the electrolytic preparation of NF 3 During the electrolysis cycle of the gas, it is necessary to manually replenish the electrolyte and remove the water.
This will have the following problems: (1) The process of synthesizing and adding electrolyte is a high-temperature and toxic operation, and long-term manual operation will affect the health of employees; NF 3 Gas generation, reduced electrolysis efficiency

Method used

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  • Device for preparing nitrogen trifluoride and application

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0069] A kind of preparation NF in this embodiment 3 The reaction kettle 15, the storage tank 16 and the electrolyzer 20 of the device of the gas are the same as the comparative example 2.

[0070] The application steps of the device are as follows:

[0071] (1) Electrolyte synthesis and storage

[0072] When NH 3 NH was detected by tank flow meter 7 and HF tank flow meter 8 respectively 3 and HF cumulative flow reaches 4.7×10 5 L and 1.16×10 6 During L, send signal to automatic control system 11; All the other are with comparative example 3 steps (1).

[0073] (2)NF 3 Electrolysis and replenishment

[0074] With comparative example 2 step (2).

[0075] The electrolysis temperature of the electrolytic cell 20 is 120° C. during the operation cycle. The electrolysis process of the electrolytic cell 20 is as follows: 1) The electrolysis time is up to 5h under the condition of a voltage of 5.5V, and the gas generated by the anode is measured, NF 3 The volume percentage c...

Embodiment 2

[0077] A kind of preparation NF in this embodiment 3 The reaction kettle 15, the storage tank 16 and the electrolyzer 20 of the device of the gas are the same as the comparative example 2.

[0078] The application steps of the device are as follows:

[0079] (1) Electrolyte synthesis and storage

[0080] NH 3 Storage tank flowmeter 7 and HF storage tank flowmeter 8 respectively adjust NH 3 and HF flow to 220L / min and 585L / min; when NH 3 NH was detected by tank flow meter 7 and HF tank flow meter 8 respectively 3 and HF cumulative flow reaches 4.49×10 5 L and 1.19×10 6 During L, send signal to automation control system 11; In reactor 15, NH 3 Gas reacts with HF gas to form NH 4 F.1.9HF electrolyte; the rest are the same as step (1) of comparative example 3.

[0081] (2)NF 3 Electrolysis and replenishment

[0082] With comparative example 2 step (2).

[0083] The electrolysis temperature of the electrolytic cell 20 is 120° C. during the operation cycle. The electrol...

Embodiment 3

[0085] A kind of preparation NF in this embodiment 3 The reaction kettle 15 of the gas device is the same as Comparative Example 2; the storage tank 16 is a 4000L nickel container, the highest liquid level is 700mm, and the lowest is 100mm; The electrolyte liquid level of tank 20 is the highest 650mm, the lowest is 530mm, and the anode and cathode are nickel plates.

[0086] The application steps of the device are as follows:

[0087] (1) Electrolyte synthesis and storage

[0088] When NH 3 NH was detected by tank flow meter 7 and HF tank flow meter 8 respectively3 and HF cumulative flow reaches 4.7×10 5 L and 1.16×10 5 During L, send signal to automatic control system 11; All the other are with comparative example 3 steps (1).

[0089] (2)NF 3 Electrolysis and replenishment

[0090] When the electrolytic tank level gauge 21 shows a value of 650mm, a signal is sent to the automatic control system 11;

[0091] Electrolytic production of NF 3 During the gasification pro...

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Abstract

The invention relates to a device for preparing nitrogen trifluoride and an application, and belongs to the field of nitrogen trifluoride preparation. The device mainly consists of an electrolytic solution synthesis system, an electrolytic solution storage system, an electrolysis system, a nitrogen collecting system and an automation control system, wherein the electrolytic solution synthesis system comprises an NH3 storage tank, an HF storage tank, an NH3 storage tank vaporizer, an HF storage tank vaporizer, an NH3 storage tank automatic valve, an HF storage tank automatic valve, an NH3 storage tank flowmeter, an HF storage tank flowmeter and a reaction kettle; the electrolytic solution storage system comprises a storage groove, an automatic valve A, an automatic valve B, a storage tank liquid indicator and a flowmeter; the electrolysis system comprises an electrolytic tank and an electrolytic tank liquid indicator; the nitrogen collecting system comprises an N2 tank, an N2 tank pressure gauge, an N2 tank automatic valve A and an N2 tank automatic valve B; and the automation control system performs remote control through signals. The application comprises synthesis of an electrolytic solution, storage of NF3, and electrolysis and supplement of NF3. The device can realize automatic supplement of the electrolytic solution for continuous electrolysis and preparation of NF3, improves the electrolytic efficiency of the electrolytic tank, and reduces high-temperature and poisonous operation of labors.

Description

technical field [0001] The invention relates to a device and application for preparing nitrogen trifluoride gas, in particular to an automatic device suitable for electrolytic preparation of nitrogen trifluoride gas and an application method thereof, belonging to the field of nitrogen trifluoride preparation. Background technique [0002] With the rapid development of the electronics industry, nitrogen trifluoride (Nitrogen Trifluoride, referred to as NF 3 ) gas has a wide range of important applications in the electronics industry. In the prior art, the preparation of NF 3 The main method of gas is molten salt electrolysis, the anode is nickel or carbon plate, the cathode is nickel, carbon plate or iron, and the electrolyte is NH 4 F·xHF molten salt, the electrolysis temperature is 90℃~140℃, the anode produces NF 3 , the cathode produces H 2 . In the prior art, the NH 4 There are two main preparation methods for F·xHF molten salt: one is to use NH 4 F·HF and HF are m...

Claims

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Application Information

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IPC IPC(8): C25B1/24C25B9/00C25B15/02
Inventor 王斌纪振红马毅斌孟祥军李翔宇冀延治
Owner PERIC SPECIAL GASES CO LTD