Standard sample wafer for microwave probe calibration

A standard sample and probe technology, applied in the field of microwave detection, can solve problems such as inaccurate standard values, and achieve the effect of improving accuracy and solving the problem of inaccurate standard values.

Active Publication Date: 2015-11-18
工业和信息化部电子工业标准化研究院
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In view of the above analysis, the present invention aims to provide a standard sample for microwave probe calibration, in order to solve the problem of inaccurate standard value of the standard sample in the prior art

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  • Standard sample wafer for microwave probe calibration
  • Standard sample wafer for microwave probe calibration
  • Standard sample wafer for microwave probe calibration

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Embodiment Construction

[0055] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0056] The present invention proposes a standard sample for microwave probe calibration, which is used to solve the problem that the standard sample in the prior art has incomplete modules and is not suitable for measurement calibration and verification in my country. In order to better understand the present invention, the following only uses Several specific examples illustrate the present invention in detail.

[0057] An embodiment of the present invention pro...

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Abstract

The invention provides a standard sample wafer for microwave probe calibration. The standard sample wafer comprises a balanced-bridge module having customized attenuation or standing wave values. The standard sample wafer eliminates resistivity sigma having larger uncertainty of measurement due to the adoption of a balanced-bridge structure, so that the design result can accord with the actual measurement result well; and the balanced-bridge structure also helps to eliminate standing-wave ratio error caused by L and W tolerance due to process zooming, thereby improving accuracy of the standard value of the standard sample wafer greatly, and solving the problem of inaccuracy of the standard value of the standard sample wafer in the prior art.

Description

technical field [0001] The invention relates to the technical field of microwave detection, in particular to a standard sample sheet for microwave probe calibration. Background technique [0002] There are two types of existing standard samples of solid-state microwave devices. One is commercial calibration sheets, typically such as the American Cascade Company, and the calibration sheets of the American GGB Company, such as Type 101-190, etc., which are mainly used for microwave on-chip test systems. For daily calibration, this standard sample is made of cheap ceramic (Al2O3) material, which has a large amount of daily use and low price. The other is a metrology-level standard sample, typically RM8130 of the National Institute of Standards and Technology NIST, which is mainly used for value transfer and comparison calibration of metrology institutions. This standard sample is made of GaAs material, and the daily use is small. But the precision is high and the price is expe...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R35/00
Inventor 殷玉喆贾宁张旭勤
Owner 工业和信息化部电子工业标准化研究院
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