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Self-calibrating pressure sensor system with pressure sensor and reference sensor that share common sealed chamber

A pressure sensor and reference sensor technology, which is applied in elastic deformation meter fluid pressure measurement, fluid pressure measurement, TV system components, etc., can solve the problems of adding reference sensors, increasing manufacturing costs, and reducing drift compensation accuracy.

Inactive Publication Date: 2015-11-25
MKS INSTR INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the accuracy of drift compensation may be reduced by the inequality between the pressure sensor and the reference sensor
Adding a reference sensor may also increase the manufacturing cost and size of the pressure sensor system

Method used

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  • Self-calibrating pressure sensor system with pressure sensor and reference sensor that share common sealed chamber
  • Self-calibrating pressure sensor system with pressure sensor and reference sensor that share common sealed chamber
  • Self-calibrating pressure sensor system with pressure sensor and reference sensor that share common sealed chamber

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Embodiment Construction

[0031] Exemplary embodiments are now described. Other embodiments may additionally or alternatively be used. Details that may be obvious or unnecessary may be omitted to save space or for more effective presentation. Some embodiments may be practiced with additional components or steps and / or without all of the described components or steps.

[0032] figure 1 An example is shown of a pressure sensor 101 and a matching reference sensor 103 that can all be fabricated using microelectromechanical systems (MEMS) deposition, patterning and etching techniques at the same time. More specifically, each of the corresponding components of the pressure sensor 101 and the matched reference sensor 103 may be fabricated layer by layer at the same time. Each layer may be deposited and / or grown, and may be made of any material such as silicon, silicon dioxide, silicon nitride, or metal. After deposition, each layer can be patterned to identify portions of the layer to be removed, and an e...

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Abstract

A self-calibrating pressure sensor system may measure the pressure of a gas or liquid. The system may include a pressure sensor, a reference sensor, and a drift compensation system. The pressure sensor may include a pressure-sensing flexible diaphragm with one side exposed to the gas or liquid and another side forming a wall of a sealed chamber. The reference sensor may include a reference flexible diaphragm that has two sides that are both within or exposed to the same sealed chamber. The drift compensation system may produce information that is indicative of the pressure of the gas or liquid based on the signal from the pressure sensor, and compensate for drift in this signal based on changes in the signal from the reference sensor. The pressure-sensing flexible diaphragm and the reference flexible diaphragm may be made at substantially the same time by depositing or growing a single layer of material in a single continuous step.

Description

[0001] Cross References to Related Applications [0002] This application is based on and claims U.S. Patent Application No. 14 / 101,177, filed December 9, 2013, entitled "SELF-CALIBRATINGPRESSURESENSORSYSTEM WITHPRESSURESENSORANDREFERENCESENSORTHATSHARECOMMONSEALEDCHAMBER," Attorney Docket No. 086400-0204 (MKS-231US) and filed April 4, 2013 Priority to U.S. Provisional Patent Application 61 / 808,443, entitled "AUTO-ZEROINGPRESSURESENSOR," Attorney Docket No. 086400-0171 (MKS-231PR). The entire contents of these applications are incorporated herein by reference. technical field [0003] The present disclosure relates to pressure sensors for sensing the pressure of gases or liquids and to microelectromechanical systems (MEMS) technology. Background technique [0004] Pressure sensors can be used to sense the pressure of gases or liquids. [0005] Before use, the pressure sensor can be calibrated against a known pressure. Nevertheless, the accuracy of the pressure sensor may ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L7/08G01L27/00B81B7/02
CPCG01L9/0047G01L9/0072G01L27/00Y10T29/49826
Inventor L·明德林S·F·巴尔特顾磊
Owner MKS INSTR INC
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