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A bidirectional serial mems actuator based on Lorentz force

A technology of Lorentz force and actuators, which is applied in the direction of relays, electromagnetic relays, detailed information of electromagnetic relays, etc., can solve the problems of high driving voltage, large displacement of motion, and restrictions on the application of MEMS actuators, so as to meet work requirements, The effect of simple structure

Active Publication Date: 2017-02-01
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Most of the existing MEMS actuators have a single structure and one-way movement. In actual application requirements, the required movement displacement is relatively large, and the required driving voltage is high, which limits the application of MEMS actuators.

Method used

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  • A bidirectional serial mems actuator based on Lorentz force
  • A bidirectional serial mems actuator based on Lorentz force
  • A bidirectional serial mems actuator based on Lorentz force

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Embodiment Construction

[0017] figure 1 A schematic diagram of the basic structure of the Lorentz force-based bidirectional series MEMS actuator of the present invention is shown. Such as figure 1 As shown, the MEMS actuator includes two juxtaposed movable elastic structures ab, cd. The use of micromachining technology can ensure that the two elastic structures have the same shape and equal size. The right anchor points b and d of the two elastic structures are connected together to form a series relationship. When voltage is applied to ports a and c of the actuator, currents in opposite directions are generated on the two serial structures. By changing the voltage between a and c, the magnitude and direction of the current in the structure can be changed.

[0018] A wire carrying a current will experience a Lorentz force in a magnetic field: the magnitude of the Lorentz force is proportional to the magnitude of the magnetic field and the current. The direction of the Lorentz force depends on th...

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Abstract

The invention provides a bidirectionally tandem MEMS actuator based on Lorentz force. The bidirectionally tandem MEMS actuator is composed of two movable elastic structures connected in series; the bidirectional motion of the structures can be realized by use of the Lorentz force under the action of a current and a magnetic field. The actuator is capable of realizing a great displacement with a very small driving current. The direction of the current is controlled to realize face-to-face movement and mutual combination of the two structures and also to realize reverse movement and separation of the two structures.

Description

technical field [0001] The invention relates to the field of microelectromechanical systems (MEMS), in particular to a bidirectional serial MEMS actuator based on Lorentz force. Background technique [0002] With the advancement of science and technology, electronic and mechanical systems are developing towards miniaturization and miniaturization, and the high-density, multi-functional, and intelligent integration of chips has become an important direction for people to study. From design to manufacture, MEMS technology characterized by miniaturization, integration, intelligence, informatization, and advanced manufacturing is not only based on microelectronics technology, but also involves computer technology, communication technology, microelectronics technology, automatic control technology, Multi-technical disciplines such as mechanical design and manufacturing can be said to be a multi-disciplinary comprehensive technology. Micro-sensors, micro-actuators, micro-optical ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81B5/00
Inventor 杨晋玲吕兴东魏伟伟张金英杨富华
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI