Metal mask cooling device and metal mask evaporating device

Abstract

The invention relates to the field of active matrix display, particularly to a metal mask cooling device and a metal mask evaporating device. The metal mask cooling device comprises a refrigerator, a power controlling unit, a power supply unit and a magnetic plate, wherein the refrigerator is attached to one side face of a base plate; under the influence of the magnetic plate on the refrigerator, the refrigerator and the metal mask are adsorbed on two side faces of the base plate; the refrigerator is controlled to work through the power controlling unit, and then the refrigerator cools a metal task; the refrigerator and the power controlling unit are powered by the power supply unit; the principle of thermoelectricity is used, the refrigerator is attached to the base plate, so that the metal mask is cooled, all parts of the mask are cooled down uniformly, and deformation of structures and positions cannot occur; the refrigerator is controlled to work through the power controlling unit; the temperature control is timely, the temperature inertia is low, and the temperature controlling efficiency is high; and the refrigerator is adopted, the installation and the maintenance are convenient, and the service life is long.

Description

technical field [0001] The invention relates to the field of active matrix display, in particular to a metal mask cooling device and a metal mask evaporation device. Background technique [0002] In the OLED (Organic Light Emitting Diode) manufacturing process, although there are many ways to pattern the organic EL (organic light-emitting electronic version) materials, the current mass production method is still based on vacuum evaporation and metal masks. The EL patterning method is widely used by various companies because it can achieve good screen performance. The metal mask is set on one side of the substrate, and the evaporation source evaporates the material onto the glass substrate, which will cause a certain temperature increase between the glass substrate and the metal mask (generally, the difference in temperature rise is about 10-30°C). The film will have a certain positional structural deformation due to temperature rise. How to ensure the quality of the metal m...

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to solve the problems of inconvenient installation and maintenance, uneven cooling, large temperature inertia and untimely control existing in the existing cooling water pipe cooling

Images