Evaporation crucible and evaporation equipment

A crucible and evaporation technology, which is applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problems of high price of evaporation materials, influence of chamber vacuum degree, chamber pollution, etc., and achieve improvement Evaporation material utilization rate, the effect of improving utilization rate and improving evaporation efficiency

CN105177507AActive Publication Date: 2015-12-23BOE TECH GRP CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2015-12-23

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Abstract

The invention relates to the technical field of evaporation and discloses an evaporation crucible and evaporation equipment in order to increase the utilization rate of evaporation materials and improve the evaporation efficiency. The evaporation crucible comprises a crucible body and a crucible opening communicated with the crucible body, wherein multiple inert gas introduction nozzles are distributed on the side wall of the crucible opening. The evaporation crucible is applied to the evaporation equipment, inert gas is introduced into the crucible opening through the multiple inert gas introduction nozzles, and inert gas molecules can collide with evaporation gas molecules in the crucible opening, so that kinetic energy for upward movement of the evaporation gas molecules is increased, and the evaporation gas molecules flying to the surface of a substrate and deposited are increased greatly. Compared with the prior art, with the adoption of the scheme, the utilization rate of the evaporation material can be increased, and the evaporation efficiency is improved.
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Description

technical field

[0001] The invention relates to the technical field of evaporation technology, in particular to an evaporation crucible and evaporation equipment. Background technique

[0002] OLED (Organic Light-Emitting Diode, Organic Light-Emitting Diode, referred to as OLED) display has thin, light, wide viewing angle, active light emission, continuously adjustable light color, low cost, fast response speed, low energy consumption, low driving voltage, With the advantages of wide operating temperature range, simple production process, high luminous efficiency and flexible display, it has been listed as a promising next-generation display technology.

[0003] Forming an OLED device on a substrate usually uses an evaporation process, which refers to heating the evaporation material under a certain vacuum condition, so that the evaporation material is melted (or sublimated) into a vapor composed of atoms, molecules or atomic groups, and then condensed on the surface of the ...

Examples

Embodiment Construction

[0046] In order to improve the utilization rate of evaporation materials and increase the efficiency of evaporation, the embodiment of the present invention provides an evaporation crucible and evaporation equipment. In order to make the purpose, technical solution and advantages of the present invention clearer, the following examples are given to further describe the present invention in detail.

[0047] Such as figure 1 As shown, the evaporation crucible 11 provided by the embodiment of the present invention includes a crucible body 12 and a crucible mouth 13 communicating with the crucible body 12 , and a plurality of inert gas inlet nozzles 14 are distributed on the side wall of the crucible mouth 13 .

[0048] In the technical solution of the embodiment of the present invention, a plurality of inert gas inlet nozzles 14 are distributed on the side wall of the crucible mouth 13, and the evaporation crucible 11 is applied to the evaporation equipment, and the plurality of ...