Evaporation device and evaporation method

A technology of evaporation and equipment, applied in the field of vacuum evaporation, which can solve the problems of large resource consumption, easy oxidation of organic materials, and long time consumption, and achieve the effects of improving equipment flexibility, saving time and resource consumption

Active Publication Date: 2015-12-23
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, due to the harsh storage conditions of organic materials, the organic materials are easily oxidized after the cavity is opened, so the organic material needs to be replaced after the cavity is opened. This process not only takes a long time, but also consumes a lot of resources.

Method used

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  • Evaporation device and evaporation method
  • Evaporation device and evaporation method
  • Evaporation device and evaporation method

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Embodiment Construction

[0045] Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, the same numerals in different drawings refer to the same or similar elements unless otherwise indicated. The implementations described in the following exemplary examples do not represent all implementations consistent with the present invention. Rather, they are merely examples of apparatuses and methods consistent with aspects of the invention as recited in the appended claims.

[0046] In the field of OLED evaporation today, figure 1 In the traditional design method, although the evaporation angle and evaporation range of a single evaporation source can be controlled, it can only be applied to specific organic materials and product processes, lacking flexibility, such as making the evaporation equipment suitable for different organic materials , need to transform the e...

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Abstract

The invention relates to an evaporation device and an evaporation method, and belongs to the technical field of vacuum evaporation. The evaporation device comprises a basal plate, an evaporation cavity and a corrugated pipe; an evaporation source is arranged in the evaporation cavity, and the side wall of the evaporation cavity is provided with two limiting plates; and the basal plate is arranged right above the evaporation source, and the corrugated pipe is arranged on the bottom of the evaporation cavity. The bottom of the evaporation cavity is provided with the corrugated pipe, the evaporation cavity is driven to move up and down by virtue of the rotation of the corrugated pipe, so that the relative height between the evaporation source and the limiting plate is changed, modification on the evaporation device is not needed, the evaporation condition of different organic materials can be satisfied, and not only can the device flexibility be obviously improved, but also the time and resource consumption can be saved.

Description

technical field [0001] The invention relates to the technical field of vacuum evaporation, in particular to an evaporation equipment and an evaporation method. Background technique [0002] With the rapid development of the OLED (Organic Light-Emitting Diode, organic light-emitting diode) industry, new organic materials continue to emerge. In order to meet the design requirements of different products, evaporation equipment is required to quickly evaporate new organic materials into organic films with different properties. [0003] Such as figure 1 As shown, the existing evaporation equipment includes: a substrate 1 and an evaporation chamber 2 . Wherein, a linear evaporation source 21 is arranged in the evaporation chamber 2 , and two limiting plates 22 are arranged on the sidewall of the evaporation chamber 2 ; the substrate 1 is located directly above the linear evaporation source 21 . During vacuum evaporation, the organic material in the evaporation source 21 is vapo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24
CPCC23C14/24C23C14/044C23C14/542C23C14/548H10K71/164C23C14/042C23C14/243
Inventor 黄俊淞申永奇叶岚凯
Owner BOE TECH GRP CO LTD
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