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Evaporation equipment and evaporation method

A technology of evaporation and equipment, applied in the field of vacuum evaporation, which can solve the problems of easy oxidation of organic materials, large resource consumption, and long time consumption, and achieve the effect of saving time and resource consumption and improving equipment flexibility

Active Publication Date: 2018-04-03
BOE TECH GRP CO LTD +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, due to the harsh storage conditions of organic materials, the organic materials are easily oxidized after the cavity is opened, so the organic material needs to be replaced after the cavity is opened. This process not only takes a long time, but also consumes a lot of resources.

Method used

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  • Evaporation equipment and evaporation method
  • Evaporation equipment and evaporation method
  • Evaporation equipment and evaporation method

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Embodiment Construction

[0045] Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, the same numerals in different drawings refer to the same or similar elements unless otherwise indicated. The implementations described in the following exemplary examples do not represent all implementations consistent with the present invention. Rather, they are merely examples of apparatuses and methods consistent with aspects of the invention as recited in the appended claims.

[0046] In the field of OLED evaporation today, figure 1 In the traditional design method, although the evaporation angle and evaporation range of a single evaporation source can be controlled, it can only be applied to specific organic materials and product processes, lacking flexibility, such as making the evaporation equipment suitable for different organic materials , need to transform the e...

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Abstract

The invention relates to an evaporation equipment and an evaporation method, and belongs to the technical field of vacuum evaporation. The evaporation equipment includes: a substrate, an evaporation chamber and a bellows; an evaporation source is arranged in the evaporation chamber, and two limiting plates are arranged on the side wall of the evaporation chamber; the substrate is arranged on the Directly above the evaporation source, the bellows is arranged at the bottom of the evaporation chamber. In the present invention, a bellows is arranged at the bottom of the evaporation chamber, and the rotation of the bellows drives the evaporation chamber to move up and down, thereby changing the relative height between the evaporation source and the limiting plate, which can meet different requirements without modifying the evaporation equipment. The evaporation conditions of organic materials not only significantly improve the flexibility of equipment, but also save time and resource consumption.

Description

technical field [0001] The invention relates to the technical field of vacuum evaporation, in particular to an evaporation equipment and an evaporation method. Background technique [0002] With the rapid development of the OLED (Organic Light-Emitting Diode, organic light-emitting diode) industry, new organic materials continue to emerge. In order to meet the design requirements of different products, evaporation equipment is required to quickly evaporate new organic materials into organic films with different properties. [0003] Such as figure 1 As shown, the existing evaporation equipment includes: a substrate 1 and an evaporation chamber 2 . Wherein, a linear evaporation source 21 is arranged in the evaporation chamber 2 , and two limiting plates 22 are arranged on the sidewall of the evaporation chamber 2 ; the substrate 1 is located directly above the linear evaporation source 21 . During vacuum evaporation, the organic material in the evaporation source 21 is vapo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24H10K99/00
CPCC23C14/24C23C14/044C23C14/542C23C14/548H10K71/164C23C14/042C23C14/243
Inventor 黄俊淞申永奇叶岚凯
Owner BOE TECH GRP CO LTD
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