Integrated motion structure of rubber head and hose
A technology of moving structure and rubber hose, which is applied in the direction of photoplate making process coating equipment, etc., can solve the problems of rubber hose damage, hose twisting, semiconductor production yield decline, etc., to prevent mutual interference and improve equipment stability.
Active Publication Date: 2020-02-07
SHENYANG KINGSEMI CO LTD
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Problems solved by technology
In the process of replacing the rubber head, the rubber head moves, but the fixed part of the rubber hose does not move. In this case, the rubber hose will be twisted, and the rubber hose will interfere with each other, resulting in friction, causing the rubber hose to be damaged, which is not conducive to the equipment. Stable operation, dust particles will also be generated due to the friction of the hose, which will lead to a decrease in the yield of semiconductor production
Method used
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[0015] The present invention will be further described below in conjunction with the accompanying drawings.
[0016] like figure 1 As shown, the present invention is arranged inside the gluing unit, including an actuator 3, a rubber hose 4, a glue head 5 and a bracket structure, wherein the actuator 3 is arranged on one side of the glue cup 7, and the bracket structure is connected to the actuator 3, a plurality of rubber hoses 4 are sequentially arranged on the bracket structure along the moving direction. The bracket structure is also provided with a plurality of rubber heads 5 corresponding to each rubber tube 4 , one end of each rubber tube 4 is connected to the bracket structure, and the other end is connected to the corresponding rubber head 5 . The bracket structure drives the rubber hose 4 and the rubber head 5 to move together in a direction parallel to the arrangement of the rubber hose 4 .
[0017] The bracket structure includes a rubber hose bracket 1, an overall...
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The invention relates to semiconductor production devices and particularly discloses an integrated movement structure of glue heads and glue tubes. The structure is arranged inside a glue-coating unit and includes an executing mechanism, the glue tubes, the glue heads and a tray structure. The executing mechanism is arranged at one side of a glue cup. The tray structure is slidably connected to the executing mechanism. The glue tubes are arranged successively on the tray structure in the movement direction. The glue heads which are respectively corresponding to the glue tubes are also arranged on the tray structure. One end of each glue tube is connected to the tray structure and the other end of each glue tube is connected to each corresponding glue head. The tray structure drives the glue tubes and the glue heads to move parallelly to the arrangement direction of the glue tubes. The structure achieves change of a plurality of the glue heads and prevents mutual interference of the glue tubes, thereby improving equipment stability.
Description
technical field [0001] The invention relates to equipment in semiconductor production, in particular to an integrated movement structure of a rubber head and a rubber tube. Background technique [0002] Inside the glue leveling and developing equipment in the production of semiconductor wafers, the fixing of the glue head and the fixing of the rubber hose are separated. Usually, the glue head is placed on a moving platform, and the root of the rubber hose is fixed on a fixed platform. In the process of replacing the rubber head, the rubber head moves, but the fixed part of the rubber hose does not move. In this case, the rubber hose will be twisted, and the rubber hose will interfere with each other, resulting in friction, causing the rubber hose to be damaged, which is not conducive to the equipment. Stable operation will also generate dust particles due to the friction of the hose, which will lead to a decrease in the yield of semiconductor production. [0003] In order t...
Claims
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IPC IPC(8): G03F7/16
Inventor 王阳胡延兵
Owner SHENYANG KINGSEMI CO LTD