Implementing method of grid sequencing in semiconductor process simulation

Abstract

The invention discloses an implementing method of grid sequencing in semiconductor process simulation, and belongs to the field of a numerical model. The implementing method comprises the steps of firstly providing two numbering ways in grid generation, including, a natural numbering way from bottom to top and an after-dispersing matrix bandwidth minimization way; after grid division is ended, storing a read process simulation instruction in a linear table; performing numerical value solution through obtaining a process step instruction in the linear table, wherein a running and solving speed is greatly increased while the precision is ensured as a variable time step method is adopted in the numerical value solving process; and finally, for a result of numerical value solution, viewing an effect after technology simulation in ViSIt software. The implementing method of grid sequencing in semiconductor process simulation can simulate devices no matter in relatively small size or relatively big size, the emulation simulation speed can be equivalent to that of business software, and the obtained result is also in consistence with that of the business software, so that the adopted method can be used for semiconductor process simulation and can be advantageously used for replacing foreign business software.

Description

technical field [0001] The invention relates to the field of numerical models, in particular to a grid sorting realization method in semiconductor process simulation. Background technique [0002] At present, the electronic information industry with semiconductor technology as the core has surpassed the traditional technology represented by automobiles and petroleum. With the continuous improvement of circuit integration on silicon wafers and the continuous increase of production processes, often an ordinary integrated circuit, a high-performance device manufacturing, the entire process may include dozens of processes, involving hundreds or even hundreds of processes. Thousands of process parameters. The traditional trial-and-error method has the problems of long cycle and high cost. On the computer, all key process steps can be simulated, which greatly shortens the design time. Therefore, computer-aided design of integrated circuits has become an indispensable and importan...

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Problems solved by technology

However, due to the high price of foreign software and the embargo of some advanced modules to China, the entire source code is invisible to users, unable to understand its entire calculation process, and unable to add the latest semiconductor physical characteristic parameters into the model, so that we The design and production of the company will always follow behind others

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