Indexing rotating table and indexing rotating table system

A rotary table and indexing technology, which is applied in the direction of manufacturing tools, metal processing equipment, and machine tools suitable for grinding workpiece planes, etc., can solve the problem of a large number of wafer fragments, reduce energy waste, improve equipment stability and work efficiency effect

Active Publication Date: 2016-03-23
CETC BEIJING ELECTRONICS EQUIP
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0003] The object of the present invention is to provide an indexing rotary table and an indexing rotary table system to solve the problem in the prior art that a large number of fragments are caused by the transfer of wafers between various devices in the process flow

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  • Indexing rotating table and indexing rotating table system
  • Indexing rotating table and indexing rotating table system
  • Indexing rotating table and indexing rotating table system

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Embodiment Construction

[0035] In order to make the technical problems, technical solutions and advantages to be solved by the present invention clearer, the following will describe in detail with reference to the drawings and specific embodiments.

[0036] The present invention aims at the problem of a large number of fragments caused by the transfer of wafers between various devices in the process flow in the prior art, and provides an indexing rotary workbench, such as Figure 1 to Figure 6 shown, including:

[0037] Rotary air flotation structure 1, drive control structure 2, turntable frame 3, base 4 and multiple film holders 5 for placing pieces to be processed;

[0038] Wherein, the rotating air floating structure 1 includes a connecting shaft 6 and a bearing platform 7 fixedly connected to the middle part of the connecting shaft 6;

[0039] The turntable frame 3 includes a fixed shaft 8 and a turntable table 9 fixedly connected to the upper end portion of the fixed shaft 8, and the turntable...

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Abstract

The invention provides an indexing rotating table and an indexing rotating table system. The indexing rotating table comprises a rotary air floatation structure, a drive control structure, a rotary disc frame, a base and multiple wafer carrying tables used for containing pieces to be treated. The drive control structure drives the rotary air floatation structure to rotate by the preset angle, so that the rotary disc frame and the wafer carrying tables are driven to rotate, and the wafer carrying tables are rotated to corresponding stations. By the adoption of the indexing rotating table, the rotary air floatation structure, the drive control structure, the rotary disc frame, the base and the wafer carrying tables used for containing the pieces to be treated are arranged so that the pieces to be treated can be switched among the stations through rotation of the indexing rotating table, multiple processes are integrated, in other words, the processes are finished on the same wafer carrying table, the problem that in the prior art, wafers are conveyed between various devices in the process procedure, and consequently a large number of the wafers are broken is solved, device stability and work efficiency are improved, and energy waste is reduced.

Description

technical field [0001] The invention relates to the technical field of semiconductor special equipment, in particular to an indexing rotary table and an indexing rotary table system. Background technique [0002] Facing today's advanced packaging market, there is an increasing demand for wafer thinning and ultra-thinning, and ultra-large wafers. Wafers are bent and deformed under their own gravity, and fragments are extremely prone to occur. However, in the traditional processing technology, the transfer of wafers between various equipment in the process increases the possibility of causing a large number of fragments, and the fragments not only greatly affect the production efficiency, but also interfere with the stability of equipment operation and affect the grinding quality. Also caused energy waste simultaneously. Contents of the invention [0003] The purpose of the present invention is to provide an indexing rotary table and an indexing rotary table system to solve...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B27/00B24B41/00B24B7/22
CPCB24B7/228B24B27/0069B24B41/00B24B41/005
Inventor 张敏杰王仲康杨生荣张文斌张景瑞
Owner CETC BEIJING ELECTRONICS EQUIP
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