Test method for uniformity of internal current distribution in wide temperature range piezoresistor valve
A piezoresistor and current distribution technology, which is applied in the direction of current density measurement, etc., can solve the problems of overheating of the resistance sheet, the influence of the resistance valve sheet being unable to control the influence of the resistance valve sheet measurement, breakdown, etc.
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Embodiment 1
[0033] According to the method for testing the uniformity of current distribution inside the varistor valve with a wide temperature range introduced in the patent specification of the present invention, the zinc oxide varistor valve was tested for the uniformity of current distribution. The specific process is as follows:
[0034] (1) For the thickness d=2mm, the upper and lower surface areas are A=13.75mm 2 The upper and lower surfaces of the zinc oxide varistor valve plate are polished so that the roughness of the upper and lower surfaces of the zinc oxide varistor valve plate is less than 1 micron;
[0035] (2) Use the zinc oxide varistor sample obtained in step (1) as the base material, coat the upper and lower surfaces of the polished sample with photoresist, and use photolithography to transfer the shape and structure of the mask plate to the surface of the above sample , after vacuum coating treatment, a plurality of micro-silver electrodes with a thickness of 100 nanom...
Embodiment 2
[0043] According to the test method for the uniformity of current distribution inside the wide temperature range piezoresistor valve plate introduced in the patent specification of the present invention, the zinc oxide varistor valve plate was tested for the influence of current distribution uniformity, and the specific process is as follows:
[0044] (1) For the thickness d=2mm, the upper and lower surface areas are A=13.80mm 2 The upper and lower surfaces of the zinc oxide varistor valve plate are polished so that the roughness of the upper and lower surfaces of the zinc oxide varistor valve plate is less than 1 micron;
[0045] (2) Use the zinc oxide varistor sample obtained in step (1) as the base material, coat the upper and lower surfaces of the polished sample with photoresist, and use photolithography to transfer the shape and structure of the mask plate to the surface of the above sample , after vacuum coating treatment, a plurality of micro-silver electrodes with a t...
Embodiment 3
[0053] According to the test method for the uniformity of current distribution inside the wide temperature range piezoresistor valve plate introduced in the patent specification of the present invention, the zinc oxide varistor valve plate was tested for the influence of current distribution uniformity, and the specific process is as follows:
[0054] (1) For the thickness d=2mm, the upper and lower surface areas are A=13.78mm 2 The upper and lower surfaces of the zinc oxide varistor valve plate are polished so that the roughness of the upper and lower surfaces of the zinc oxide varistor valve plate is less than 1 micron;
[0055] (2) Use the zinc oxide varistor sample obtained in step (1) as the base material, coat the upper and lower surfaces of the polished sample with photoresist, and use photolithography to transfer the shape and structure of the mask plate to the surface of the above sample , after vacuum coating treatment, a plurality of micro-silver electrodes with a t...
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