Method for testing current distribution uniformity inside monolithic piezoresistor valve plate
A technology of varistor and test method, applied in the direction of measuring current/voltage, measuring electricity, measuring device, etc., can solve the test of current uniformity of single zinc oxide varistor valve piece, resistance piece overheating, breakdown, etc. question
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[0021] The method for testing the uniformity of current distribution inside the monolithic varistor valve disc comprises the following steps:
[0022] (1) Polishing the upper and lower surfaces of the ZnO varistor valve with a thickness of d and an upper and lower surface area of A, so that the roughness of the upper and lower surfaces of the ZnO varistor valve is less than 1 micron;
[0023] (2) Using photolithography, transfer the shape and structure of the mask plate to the upper and lower surfaces of the polished ZnO varistor valve, and use the vacuum coating method to deposit thicknesses on the upper and lower surfaces of the ZnO varistor. 90-110 nanometer micro-silver electrode array;
[0024] (3) Divide the upper surface of the above-mentioned ZnO varistor valve into n units, the area of each unit is s, use a microprobe to contact each silver electrode on any unit area, make a thin lead plate and The lower surface of the ZnO piezoresistor valve is bonded, a continu...
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