Fabrication method of flexible vibration sensor based on PVDF nanofiber
A vibration sensor and nanofiber technology, which is applied in the field of self-powered vibration sensor production, can solve the problems of complex production process, high brittleness of ZnO, no overall packaging, etc., achieve good biocompatibility and improve the output of piezoelectric signals
Active Publication Date: 2018-09-21
HUBEI UNIV
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Problems solved by technology
[0003] On July 22, 2011, Wang Zhonglin and others applied for the invention patent "ZnO nanofiber-based self-powered vibration sensor and its manufacturing method" and the corresponding article ("Nanogenerator as self-powered vibrationsensor", "Nano Energy", 1:418 -423(2012)) also provides a method for making a self-powered vibration sensor, but the method is more complicated to make and the semiconductor piezoelectric material ZnO is brittle; on the other hand, because it uses upper and lower electrodes and The packaging materials of the electrodes are different, and there is no overall packaging, so the thickness of the device is relatively thick and the structure is relatively unstable
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[0050] Embodiment of the present invention will be further described below in conjunction with accompanying drawing:
[0051] as attached Figure 1~3 , the present invention is based on PVDF nanofiber flexible vibration sensor manufacturing method, the flexible vibration sensor includes: electrode body and PDMS encapsulation layer; The electrode body includes: PDMS base layer 5, PVDF nanofiber 1, Interdigital electrode 2, the leading end of the interdigital electrode 2 is connected with a lead-out electrode 3; the PDMS base layer 5 is polydimethylsiloxane colloid with a set thickness, and the PVDF nanofiber 1 is formed by electrospinning PVDF nanofibers prepared and collected by silicon wafers, the interdigital electrodes 2 are a layer of aluminum electrodes sputtered on the PVDF nanofibers 1 by magnetron sputtering, and the PDMS encapsulation layer is encapsulated on the The polydimethylsiloxane colloid on the outer surface of the electrode body; only the upper packaging lay...
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The invention discloses a manufacturing method for a flexible vibration sensor based on PVDF nanofiber. The sensor comprises an electrode body and a packaging layer. The electrode body comprises a base layer, the PVDF nanofiber and interdigital electrodes, which are arranged from the bottom up in sequence. The PVDF nanofiber is PVDF nanofiber layers collected on silicon wafers arranged between two aluminum sheets on an acceptance pole plate and prepared through a known electrostatic spinning method; aluminium electrodes are sputtered out through a magnetron sputtering method on the PVDF nanofiber layers; and the packaging layer and the base layer are respectively made of a polydimethylsiloxane (PDMS) rubber body. The manufacturing method is characterized in that the PVDF nanofiber is transferred to the PVDF thin film of the base layer (5) by adopting a coating process; and the polydimethylsiloxane (PDMS) rubber body is packaged to the outer surface of the electrode body by adopting a dip-coating process. The output response sensitivity of the sensor is high for different vibration amplitudes or vibration frequencies, and the sensor can well describe vibration and motion states of some objects.
Description
technical field [0001] The invention relates to a method for manufacturing a flexible vibration sensor based on PVDF nanofibers, in particular to a method for manufacturing a self-powered vibration sensor based on the piezoelectric power generation effect of PVDF (polyvinylidene fluoride) nanofibers, which belongs to organic one-dimensional nano functional materials and sensors. Background technique [0002] Sensors are devices that convert physical quantities, chemical quantities or biomass into measurable electrical signals. Vibration sensors include three types: mechanical, optical, and electrical. General vibration sensing requires external power supply. As far as the application field is concerned, the production cost is increased and its application occasions are limited. As an organic piezoelectric material, PVDF has very good flexibility and is the best choice for ultra-flexible vibration sensors; although the known piezoelectric materials with perovskite structures...
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IPC IPC(8): G01H11/08
CPCG01H11/08
Inventor 顾豪爽潘绪敏王钊胡永明
Owner HUBEI UNIV