The invention discloses a magnetic drive micro-inertial sensor for increasing the detection
capacitance and its preparation method. The
mass increase of the sensor oscillator and the decrease of the pole plate distance are limited in the prior art. In the invention, the
mass block of the sensor is the rectangle
silicon chip with the grid-like strips, both ends are connected with the
anchor point by the
silicon support girder, both sides are respectively provided with
silicon trips, a ring groove is arranged in the middle of the driver
mass block, a detecting silicon strip is arranged at one side of the driver mass block corresponding to the sensor block, a driver
welding point is arranged at the anchor position at the outer side of the driver mass block near the U-shaped girder, the driver
welding point is connected with the driver
anchor point, an external current driven
welding points are arranged at two anchor points relative to the driver, a
metal driven lead is arranged among the external current driven welding points. An interdigital
aluminium electrode is arranged on the glass
substrate surface, each grid-like strip of the sensor mass block is corresponding to each pair of fork finger in the interdigital
aluminium electrode. The invention has simple technology, is beneficial for reducing the cost and the improving the
yield rate.