Optimized piezo driven micro spraying device and fabricating method

A technology of piezoelectric drive and processing method, which is applied in the field of medical equipment, can solve the problems of small flow rate of micro-spray, and achieve the effect of increasing flow rate, avoiding water film problem, and uniform distribution of droplet spraying

Inactive Publication Date: 2005-01-12
TSINGHUA UNIV +1
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  • Abstract
  • Description
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Problems solved by technology

[0006] The purpose of the present invention is to solve the problem of the water film on the outer surface of the nozzle hole existing in the existing piezoelectric-driven array micro-spray and the problem that the flow rate of the micro-spray is relatively small when the nozzle hole is relatively small
[0007] Another object of the present invention is to solve the problem that existing piezoelectric-driven array micro-sprays do not eject liquid droplets in each piezoelectric drive.

Method used

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  • Optimized piezo driven micro spraying device and fabricating method
  • Optimized piezo driven micro spraying device and fabricating method
  • Optimized piezo driven micro spraying device and fabricating method

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Embodiment Construction

[0029] According to the requirements of the application and previous relevant research results, the embodiment of the optimized piezoelectric-driven array micro-spray structure designed by the present invention is as follows image 3 shown. The device is mainly composed of an orifice membrane 13 , an elastic cavity membrane 9 and a piezoelectric sheet 10 . The orifice film 13 first uses the ICP process to etch the micro-nozzle array 12, and then uses the bulk silicon process to etch the groove structure on the silicon wafer, and makes the micro-nozzle become a through hole, and the diameter of the micro-nozzle is controlled at 3 Between ~30μm, the length is 30μm, and the number of nozzle holes is 4000. The elastic cavity membrane 9 is the remaining part after the circular grooves with a diameter of 10 mm, a depth of 100 μm and a depth of 200 μm are respectively etched on the upper and lower surfaces of the silicon wafer by the bulk silicon process, and the thickness is 100 μm...

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Abstract

An optimized microsprayer driven piezoelectrically is composed of a membrane with spray orifices, an elastic cavity membrane and piezoelecric sheet on whose both surfaces the aluminium electrodes are plated. said elastic cavity membrane is combined with said piezoelectric sheet to form a piezoelectric transducer. said orifice membrane is adhered with said electric cavity membrane to form a closed liquid cavity. Its advantages are no water membrane, and increased flow.

Description

technical field [0001] The invention relates to a device for injecting medicine into a human body after atomization, and belongs to the field of medical equipment. Background technique [0002] At present, the micro-spray used for inhalation drug therapy (Inhalation Drug Therapy, IDT) has received extensive attention. As a non-invasive treatment with few side effects, IDT is a common treatment for asthma and other lung diseases and has a market potential of about $12 billion. In addition, in the treatment of diabetes, IDT is also a potential alternative to the traditional insulin injection method. [0003] The inventors have developed a piezoelectric-driven array micro-spray facing IDT applications in the past, and its structure is as follows: figure 1 shown. The device includes an orifice membrane 1 , an elastic chamber membrane 4 , a circular piezoelectric sheet 5 and electrode leads 7 . The orifice film 1 uses the bulk silicon process to etch a groove on the silicon w...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): A61M11/00
Inventor 周兆英朱俊华杜桂彬冯焱颖张毓笠史文勇
Owner TSINGHUA UNIV
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