Magnetic drive micro-inertial sensor for increasing detection capacitance and preparation method

Abstract

The invention discloses a magnetic drive micro-inertial sensor for increasing the detection capacitance and its preparation method. The mass increase of the sensor oscillator and the decrease of the pole plate distance are limited in the prior art. In the invention, the mass block of the sensor is the rectangle silicon chip with the grid-like strips, both ends are connected with the anchor point by the silicon support girder, both sides are respectively provided with silicon trips, a ring groove is arranged in the middle of the driver mass block, a detecting silicon strip is arranged at one side of the driver mass block corresponding to the sensor block, a driver welding point is arranged at the anchor position at the outer side of the driver mass block near the U-shaped girder, the driver welding point is connected with the driver anchor point, an external current driven welding points are arranged at two anchor points relative to the driver, a metal driven lead is arranged among the external current driven welding points. An interdigital aluminium electrode is arranged on the glass substrate surface, each grid-like strip of the sensor mass block is corresponding to each pair of fork finger in the interdigital aluminium electrode. The invention has simple technology, is beneficial for reducing the cost and the improving the yield rate.

Description

technical field [0001] The invention belongs to the technical field of micro-electronic machinery, relates to a micro-inertial sensor, in particular to a micro-inertial sensor with a magnetic drive to increase detection capacitance and a manufacturing method thereof. Background technique [0002] In recent ten years, accelerometers made with micromechanical technology have been developed rapidly. Its main acceleration detection technologies include piezoresistive detection, piezoelectric detection, thermal detection, resonance detection, electromagnetic detection, light detection, tunnel current detection and capacitance detection. In addition, there are accelerometers based on other detection technologies, such as optical accelerometers, electromagnetic accelerometers, and capacitive accelerometers. The development of optical accelerometers is mainly to combine the advantages of light and micromechanics to make sensors with high electromagnetic shielding or good linearity....

AI Technical Summary

Problems solved by technology

For comb-shaped capacitive sensors processed by bulk silicon technology such as Deep Reactive Particle Etching (Deep RIE), the aspect ratio of the plate capacitance is generally less than 30:1, which limits the increase in the mass of the sensor vibrator and the Reduced plate spacing

For small-pitch plate capacitors, the pressure film air damping is relatively large, which increases the mechanical noise of the sensor

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