The invention discloses a light-operated terahertz wave modulation device and a preparation method thereof. The light-operated terahertz wave modulation device comprises a substrate, a buffer layer, aheterogeneous layer, a first electrode, a second electrode and a voltage and current source which are arranged in sequence, wherein the voltage and current source comprises a positive electrode output end and a negative electrode output end, the substrate comprises a first surface and a second surface which are opposite to each other, the first electrode is arranged on the first surface, the second electrode is arranged on the second surface, a plurality of columns of transistors are formed on the heterogeneous layer, the plurality of columns of transistors are connected in series, ohmic electrodes of the plurality of columns of transistors are connected with the first electrode, gates of two adjacent columns of transistors are connected, the gates are connected with the second electrode,the ohmic electrodes, the gates, the first electrode and the second electrode form a composite metasurface structure, the gates regulate and control channel conductance between every two adjacent ohmic electrodes in each column, the composite metasurface structure is converted between the resonance metasurface and a wire grid, and the sensitivity of the light-operated terahertz modulation deviceis greatly improved.