Single-crystal furnace discharge cooling system

Abstract

The invention relates to a single-crystal furnace discharge cooling system which comprises a pedestal, a conveying frame, 5 or more than 5 roller assemblies, a driving mechanism, two guide plates and spray cooling devices, wherein the conveying frame is arranged on the pedestal; the roller assemblies are installed in the conveying frame; the driving mechanism is installed on one side of the conveying frame; the driving mechanism is respectively connected with the 5 or more than 5 roller assemblies; the two guide plates are arranged in a relative tilt mode, and respectively connected to two side walls of the conveying frame; the roller assemblies are positioned below the two guide plates; both sides of the conveying frame are respectively provided with the spray cooling devices; and the spray cooling devices are installed on the pedestal. The single-crystal furnace discharge cooling system has the advantages of simple structure, high practicality and high efficiency, and is easy to manufacture.

Description

technical field [0001] The patent of the present invention relates to the technical field of single crystal furnaces, in particular to a single crystal furnace discharge cooling system. Background technique [0002] Czochralski is a periodic, discontinuous production process. After each cycle is over, it is necessary to wait for the temperature in the furnace to cool below 300°C before dismantling, cleaning and preparation for the next production cycle. In addition, since the Czochralski single crystal production process is a continuous high-temperature process, in order to reduce the energy consumption of crystal pulling, a large number of insulation layers are installed in the furnace, resulting in the need to wait 6 to 10 hours after the shutdown of the furnace to cool down the thermal field in the furnace. The time accounts for 1 / 8 of the entire production cycle. During this period, the furnace is idle, which reduces the operation rate of the single crystal manufacturi...

AI Technical Summary

Problems solved by technology

During this period, the furnace is idle, which reduces the operating rate of the single crystal manufacturing device and affects the efficiency of the single crystal furnace pulling crystal.

And if the material is cooled too fast in the process of using the single crystal furnace, it will also affect the material itself, resulting in unnecessary losses

Images