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Absolute grating scale, main grating thereof, and measuring method thereof

A main grating and grating scale technology, applied in the field of measurement, can solve the problem that the reference code channel and the incremental code channel cannot measure the distance in two dimensions.

Active Publication Date: 2016-05-25
SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this kind of absolute grating ruler is currently limited to one-dimensional ranging, and the reference code track and incremental code track of this structure cannot be extended to two-dimensional ranging

Method used

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  • Absolute grating scale, main grating thereof, and measuring method thereof
  • Absolute grating scale, main grating thereof, and measuring method thereof
  • Absolute grating scale, main grating thereof, and measuring method thereof

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Embodiment Construction

[0023] The preferred embodiments of the invention will be further described in detail below.

[0024] figure 1 As shown, an embodiment of an absolute grating scale includes a main grating 15 and a reading head component, and the reading head component includes an incremental displacement measurement unit 23 and a reference position measurement unit 22, wherein the reference position measurement unit 22 It includes a first spectroscope 12 , a mask plate 13 and a reference position photodetector 14 , and several reference coding tracks 2 are distributed on the main grating 15 .

[0025] The first beam splitter 12 divides the light from the light source 11 (such as a laser diode) into two beams of laser light: one beam is directed to the main grating, and the other beam is directed to the incremental displacement measurement unit 23 for measuring The incremental displacement by which the readhead moves relative to the main grating 15. The light beam directed to the main grating...

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Abstract

The invention discloses an absolute grating scale, a main grating thereof, and a measuring method thereof. The absolute grating scale includes a main grating and a reading head part, wherein the reading head part includes an increment displacement measuring unit, and also includes a first spectroscope, a masking plate and a reference position photoelectric detector; a plurality of reference coding channels are distributed on the main grating; the distance between any two adjacent reference coding channels is different from the distance between any other two adjacent reference coding channels; the first spectroscope is used for splitting the light of a light source into light beams projecting to the main grating and light beams projecting to the increment displacement measuring unit; the light beams projecting to the main grating achieves the main grating after penetrating through the masking plate, and then is reflected, and then is received by the reference position photoelectric detector after penetrating through the masking plate again; and the coding channel corresponding to the reference coding channel is arranged on the masking plate. The absolute grating scale, the main grating thereof, and the measuring method thereof can be applied to the precision measurement link of the precision machining and detection field.

Description

【Technical field】 [0001] The invention relates to the field of measurement, in particular to an absolute grating ruler, its main grating and a measuring method thereof. 【Background technique】 [0002] The distance measuring principle of the grating ruler is to use the ±1st-order diffracted light of the reference grating and the measuring grating to form interference fringes. When the reading head is displaced along the length of the measuring grating, the incremental displacement is calculated by counting the number of moving interference fringes. Hyde The grating scale of Han Company has two kinds of code tracks: incremental code track and reference code track. These two code tracks are separated in space, that is, the upper one of the grating scale is the reference code track, and the lower one is the incremental code track. , There are several groups of reference codes set on the reference code track. When working each time, the reading head only needs to move a small dis...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 李星辉倪凯王欢欢周倩冒新宇曾理江肖翔
Owner SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV