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A high-efficiency grinding and polishing device

A processing device and high-efficiency technology, which can be used in grinding drive devices, grinding/polishing equipment, metal processing equipment, etc. Improved distribution uniformity, improved accuracy and efficiency

Inactive Publication Date: 2018-11-06
张欣
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0015] According to the above analysis, the grinding and polishing tracks of dressing ring and planetary wheel grinding and polishing equipment are unevenly distributed, which limits the improvement of grinding and polishing processing accuracy and efficiency.

Method used

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  • A high-efficiency grinding and polishing device
  • A high-efficiency grinding and polishing device
  • A high-efficiency grinding and polishing device

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Embodiment Construction

[0043] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0044] Such as Figure 5 As shown, a high-efficiency grinding and polishing device according to the present invention includes: a sun gear 4, a planetary gear 7 and an inner ring gear 1, wherein the sun gear 4, the planetary gear 7 and the inner ring gear 1 At least one of the three is a non-circular gear (also called a special-shaped gear, which is different from a traditional circular gear), that is, at least one of them is a non-circular gear, and the three...

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Abstract

The invention discloses an efficient grinding and polishing machining device which comprises a sun gear, planetary gears and an inner gear ring. An object carrying hole is formed in each planetary gear. A workpiece is arranged in the object carrying hole of each planetary gear. The planetary gears are engaged with the sun gear and the inner gear ring. The pitch curve of at least one of the sun gear, the planetary gears and the inner gear ring is not regularly circular, and then the centers of the planetary gears move in the radial direction when the planetary gears rotate around the center of the sun gear; and the distance between the center of each planetary gear and the center of the sun gear is not a constant any more and is a function of the grinding and polishing time t, then distribution evenness of the grinding and polishing track is improved, and the aim of improving the precision and efficiency of precision and super precision grinding and polishing machining is achieved.

Description

technical field [0001] The invention relates to the field of mechanical manufacturing, in particular to a high-efficiency grinding and polishing device using a planetary mechanism. Background technique [0002] Precision and ultra-precision grinding and polishing are important processing techniques for large-scale integrated circuits, LEDs, computer disks and other products, and are used to obtain flat and smooth surfaces. This process is usually carried out with dressing ring type or planetary wheel type grinding and polishing equipment, the former is mainly used for single-side grinding and polishing, and the latter is mainly used for double-side grinding and polishing. The main tool for grinding and polishing is a grinding disc or a polishing pad, on which free or fixed abrasives are scattered. In the movement track of the abrasive relative to the workpiece to be processed, the part where the abrasive actually interacts with the processed surface is called the grinding a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B37/28B24B27/00B24B47/12
CPCB24B27/0076B24B37/28B24B47/12
Inventor 张欣
Owner 张欣