A device and method for measuring out-of-plane displacement of a mirror surface based on geometric optics
A technology of geometric optics and displacement measurement, applied in measurement devices, optical devices, instruments, etc., can solve problems such as time-consuming inspections
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[0030] The purpose of the present invention is to provide a low-cost, practical and easy-to-install device for measuring out-of-plane displacement of a mirror surface based on geometric optics.
[0031] The purpose of the present invention is achieved like this: figure 1 , in the figure: 21-target mirror, 22-monitoring mirror, 13-illumination system, 27-camera, 210-computer), a monitoring mirror 22 is placed in parallel with respect to the objective mirror 21, requiring that the surfaces are parallel to each other and not mutually There is a torsion angle, which ensures multiple reflections of light on the two mirror surfaces. The lighting system 13 is arranged in a square to ensure that at least four point light sources are installed at the corners. When the point light source is lit, the light is repeatedly reflected on the two mirror surfaces. Camera 27 shoots, in computer 210, you can see the multi-level dot matrix produced, each level of dot matrix is on the corner of t...
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