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A pressure detection device, a support mechanism and a transmission device

A support mechanism and detection device technology, applied in the direction of measuring devices, measuring fluid pressure, instruments, etc., can solve the problems of multiple equipment, time and manpower consumption, and large production space, so as to achieve simple overall structure, save production time, and improve production efficiency effect

Inactive Publication Date: 2019-07-26
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the commonly used detection method is to use special equipment to perform flatness detection on a specific detection platform. In this way, two kinds of equipment are used for transmission and detection at different times, which will consume a lot of time and manpower, and there are many equipments, occupying production capacity. Large space, resulting in high cost and low efficiency
In addition, the existing transmission mechanism cannot sense the pressure overload of the sample on the support mechanism in real time, resulting in damage to the support mechanism when the pressure of the support mechanism is overloaded, which in turn affects the transmission of the sample, making it difficult to monitor in real time

Method used

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  • A pressure detection device, a support mechanism and a transmission device
  • A pressure detection device, a support mechanism and a transmission device
  • A pressure detection device, a support mechanism and a transmission device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] refer to Figure 5 , the support mechanism provided by the embodiment of the present invention is used to support the sample 200 , the support mechanism includes a support 40 and the above-mentioned pressure detection device, and the pressure detection device is fixed on the support 40 . Specifically, the pressure transfer unit 20 is disposed on the support 40 . In order to ensure that the support mechanism can reduce the friction between the support mechanism and the sample 200 while supporting the sample 200 , it is preferable to configure the pressure sensing unit 10 as a ball 101 . The ball 101 transmits the received pressure to the pressure detection unit 30 through the pressure transmission unit 20 while supporting the sample 200 . In this embodiment, by setting the pressure sensing unit 10 as a ball 101, when the sample 200 is transferred, the ball 101 rolls along with the movement of the sample 200, which can support the sample 200 while reducing the pressure o...

Embodiment 2

[0043] Figure 7 A schematic structural diagram of the support mechanism of the second embodiment of the present invention is shown.

[0044] Such as Figure 7 As shown, the support mechanism of this embodiment has all the structures of the support mechanism of Embodiment 1, the support member 40 also has a downward groove 401, the ball 101 is located above the groove 401, and the diameter of the groove 401 is larger than The diameter of the ball 101 is provided with an overload detection device 50 at the bottom of the groove 401 .

[0045] In this implementation, by installing the overload detection device 50 at the bottom of the groove of the support, when the pressure on the ball is greater than the preset threshold, the preset breaking point on the support rod 201 will break due to excessive pressure, causing the ball to fall off. Falling to the bottom of the groove 401, the overload detection device 50 is triggered.

[0046] The breaking point in this embodiment can be...

Embodiment 3

[0050] Figure 8 A schematic structural diagram of the supporting mechanism of Embodiment 3 of the present invention is shown.

[0051] Such as Figure 8 As shown, the support mechanism in this embodiment is basically the same as that in Embodiment 1, the main difference is that the support mechanism provided in this embodiment can be provided with a top cover on the basis of the support mechanism in Embodiment 1, and the top cover includes a top plate 601 and a side The wall 602 and the top plate 601 are provided with a through hole, and the ball 101 passes through the through hole. The pressure detection unit 30 is disposed on the inner side of the top plate 601 , and the side wall 602 is fixed on the support member 40 . Specifically, the ball 101 passes through the through hole of the top plate 601 to support the sample 200, and the ball 101 can roll in the through hole.

[0052] In addition, a wiring groove 603 may also be provided inside the side wall 602 for placing p...

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PUM

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Abstract

The invention provides a pressure detection apparatus, a support mechanism and a conveying device. The pressure detection apparatus comprises a pressure sensing unit, a pressure transferring unit and a pressure detection unit. The pressure transferring unit transfers the pressure sensed by the pressure sensing unit to the pressure detection unit. According to the invention, through setting of the pressure detection apparatus on a support member, pressure imposed by a sample on each support mechanism can be detected during transferring of the sample, so that the flatness of the sample can be determined according to the pressure imposed on each support mechanism.

Description

technical field [0001] The invention relates to the technical field of semiconductor processing, in particular to a pressure detection device, a support mechanism and a transmission device. Background technique [0002] In the semiconductor production line, the transfer mechanism is an indispensable device in the semiconductor production process, and is mainly used to transfer samples (such as Glass, silicon wafer, etc.). Existing transmission mechanisms generally include multiple support mechanisms. Such as figure 1 As shown, each support mechanism includes a support member 102 and a ball 101 disposed on the top of the support member 102 . When there is relative movement between the sample and the transmission mechanism, the balls 101 of each support mechanism roll along with the movement of the sample, and the balls 101 can reduce the friction between the support mechanism and the sample while supporting the sample, thereby avoiding the impact of the support mechanism on...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B21/30G01L19/06G01L19/00
CPCG01B21/30G01L19/00G01L19/0618
Inventor 薛金祥孙中元张小磊
Owner BOE TECH GRP CO LTD