Coordinate measuring machine, probing system and method for compensating force at probe element

Abstract

The invention a coordinate measuring machine, a probing system and a method for compensating a force at a probe element. A probing unit (16) comprises an actuator (21) which is arranged and designed in such manner that a force is applicable to the probe element with respect to at least one actuating direction in variable and defined manner, the force depending on an applied actuating signal. Movement information about an expected movement of the probing unit (16) is received, the movement information provides information about an expected displacement behaviour of the probe element relative to the probing unit due to induced forces emerging by moving the probing unit (16). At least one particular expected displacement behaviour of the probe element is derived for at least one particular moving point based on the movement information and the actuating signal is determined for the at least one particular moving point based on the at least one particular expected displacement behaviour, the actuating signal provides applying a defined counterforce to the probe element by the actuator (21) as to the expected displacement behaviour at the particular moving point.

Description

technical field [0001] The present invention generally relates to a method for compensating or avoiding effects on a stylus element of a Coordinate Measuring Machine (CMM) which are believed to arise due to moving the stylus element according to a given measurement path. Background technique [0002] In order to check predetermined object parameters, such as the size and shape of the object, it is common practice to inspect the workpiece after production on a coordinate positioning device such as a coordinate measuring machine (CMM). [0003] In a conventional 3D coordinate measuring machine, the probe is supported for movement along three mutually perpendicular axes (in directions X, Y and Z). In this way, the probe can be guided to any point in the space of the measurement volume of the coordinate measuring machine, and the object can be measured with the measuring sensor (probe unit) carried by the probe. [0004] In a simple form of a coordinate measuring machine, suita...

AI Technical Summary

Problems solved by technology

Due to the passive nature of existing probes (using viscous fluids), a certain rate of lift-off at the surface to be contacted may still occur

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