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Organic-inorganic hybrid integrated thermo-optical modulation type grating and preparation method thereof

An integrated thermo-optic and modulation technology, applied in the direction of optical waveguide light guide, light guide, optics, etc., can solve the problem that the thermo-optic modulation effect of the full silica grating is not obvious, and achieve excellent transparency, low price, and high thermo-optic coefficient. Effect

Inactive Publication Date: 2016-07-13
苏州峰通光电有限公司
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  • Application Information

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Problems solved by technology

[0004] For this reason, the technical problem to be solved by the present invention is to at least partially overcome the above-mentioned shortcomings in the prior art, such as the insignificant thermo-optic modulation effect of the all-silica grating, so as to propose a low-power consumption, wide-range wavelength modulation Organic-inorganic hybrid integrated thermo-optic modulation grating and preparation method thereof

Method used

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  • Organic-inorganic hybrid integrated thermo-optical modulation type grating and preparation method thereof
  • Organic-inorganic hybrid integrated thermo-optical modulation type grating and preparation method thereof
  • Organic-inorganic hybrid integrated thermo-optical modulation type grating and preparation method thereof

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preparation example Construction

[0073] refer to image 3 , is a flowchart of a method for preparing an organic-inorganic hybrid integrated thermo-optic modulation grating according to another embodiment, and the preparation method includes the following steps:

[0074] Step S1: forming an inorganic optical material layer on the base layer.

[0075] Step S2: preparing the inorganic optical material layer to form a first core layer structure.

[0076] Step S3: forming a second core structure on the base layer and in the gap of the first core structure, the material of the second core structure includes an ultraviolet polymerized fluorinated polymer material, and the first The core layers and the second core layers are arranged alternately along the light propagation direction.

[0077] Step S4: Spin coating polymer material around the first core layer and the second core layer to form an upper cladding structure.

[0078] Step S5: forming a heating electrode layer structure on the upper cladding layer struc...

Embodiment approach

[0079] As a preferred embodiment, the method for preparing an organic-inorganic hybrid integrated thermo-optic modulation grating sequentially performs the following steps, and corresponding to the specific steps of the preparation method, the generation process of the organic-inorganic hybrid integrated thermo-optic modulation grating is as follows: Figure 4 shown.

[0080] The specific steps of forming an inorganic optical material layer on the base layer in the above step S1 include:

[0081] Step S11: growing a layer of inorganic optical material 2-1 on the base layer 1; preferably, the method of growing a layer of inorganic optical material 2-1 on the base layer 1 adopts plasma enhanced chemical vapor deposition. The base layer is made of silicon dioxide.

[0082] Step S12: Doping the inorganic optical material layer 2-1 with ions; preferably, germanium ions are used as the ions.

[0083] Step S13: annealing and hardening the ion-doped inorganic optical material layer....

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Abstract

The invention discloses an organic-inorganic hybrid integrated thermo-optical modulation type grating and a preparation method thereof. The grating comprises a substrate layer which employs an inorganic optical material; a core layer which is formed on the substrate layer and comprises a first core layer and a second core layer alternatively arranged along a light spreading direction, wherein the first core layer employs an inorganic optical material, and the material of the second core layer comprises an ultraviolet convergent type fluorinated polymer material; an upper wrapping layer which is formed at the periphery of the core layer and employs a polymer material; and a heating electrode layer which is formed on the upper wrapping layer. The organic-inorganic hybrid integrated thermo-optical modulation type grating and the preparation method thereof can realize low-loss large-scope wavelength modulation.

Description

technical field [0001] The invention relates to the technical field of waveguide gratings and their preparation methods, in particular to an organic-inorganic hybrid integrated thermo-optic modulation type grating and its preparation method. Background technique [0002] At present, the manufacture of grating devices mainly uses inorganic optical materials such as silicon dioxide. Deposit a layer of doped silicon dioxide as the core layer, etch a grating pattern on the core layer after another high-temperature densification treatment, and finally deposit a layer of silicon dioxide as the upper cladding layer, and after the third high-temperature densification treatment Finish the grating preparation. [0003] This kind of grating device is all made of silica inorganic optical material, and it needs three high-temperature densification treatments during the preparation process. Since the thermal expansion coefficients of the substrate silicon material and the waveguide silic...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B6/12G02B6/134G02B6/136
CPCG02B6/12009G02B6/134G02B6/136G02B2006/12069G02B2006/12176G02B2006/12197
Inventor 田亮髙任峰汪昌君马春雷
Owner 苏州峰通光电有限公司
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