Method and device for managing process formula in semiconductor equipment

Abstract

The invention discloses a method for managing process recipes in semiconductor equipment, which comprises the following steps: obtaining the user name of the user, and obtaining the formula type and attribute information of the target process formula; judging the current target process according to the formula type of the current target process formula Whether the recipe belongs to the parent recipe or the sub-recipe; the operation steps of the parent recipe: the current user can edit the current target process recipe created by himself; the operation steps of the sub-recipe: the current user can edit the parent recipe created by himself and not used by other users The current target process recipe; otherwise, if the current target process recipe is used by other users’ parent recipes, the current user can only perform read-only operations on the current target process recipe. The management method avoids the problem of process formula errors caused by arbitrary editing of process formulas by different users through the refinement of process formula rights. The invention also discloses a management device for process formula in semiconductor equipment.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a method for managing process recipes in semiconductor equipment and a device for managing process recipes in semiconductor equipment. Background technique [0002] In the semiconductor manufacturing industry, different etching machines involve different process recipes, that is, the secret recipe for etching the object to be etched, which includes multiple steps in the processing process and various processes in each step. Parameter values ​​and durations. [0003] With the development of the etching process, the etching machine is no longer limited to only calling the sub-recipe of a single process recipe when performing an automated process, but can call the parent recipe of multiple process recipes to realize the etching of silicon wafers. Eclipse, therefore, needs to edit more and more subrecipes and parent recipes of crafting recipes to match it. [0004] At presen...

AI Technical Summary

Problems solved by technology

[0004] At present, the management of process recipes is generally managed according to the roles of users. The roles of users usually include production personnel, process engineers, etc., and different roles have different operation rights for process recipes. For example, production personnel only perform fixed production operations. , I don’t know much about the etching machine, so I only have the right to browse the process formula, and the process engineer needs to edit the process formula of the equipment, so I have the right to read and write the process formula

However, under normal circumstances, the authority of the process engineer is not refined, but a unified authority is assigned to the process engineer, that is, as long as the user belongs to the role of the process engineer, he can read and write the sub-recipe and parent formula of the process recipe Operations, including modification and deletion, etc., it is easy to accidentally delete or modify the sub-recipe and parent formula of other process engineers, resulting in process formula errors, and when the parent formula created by different users uses the same sub-recipe, if the If the content of the sub-recipe is modified, it will affect the parent recipe of other users, and it will also cause errors in the process recipe

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