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Laser machining device of annular micropore and laser machining method of annular micropore

A laser processing method and laser processing technology, applied in laser welding equipment, metal processing equipment, manufacturing tools, etc., can solve the problems of low processing efficiency, uncontrollable micropore size, and single shape, and achieve high processing efficiency and easy operation. , the effect of simple installation

Active Publication Date: 2016-09-21
JIANGSU UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Aiming at the disadvantages of low processing efficiency, uncontrollable micropore size, and single shape in the laser microhole technology in the prior art, the present invention provides a laser processing device and method for annular microholes, which use precious metal nanoparticles to make laser energy The surface of the workpiece is processed to form a ring-shaped energy-intensified area, which realizes the laser processing of ring-shaped micro-holes, and has the characteristics of high precision, controllable size, high processing efficiency, and simple equipment.

Method used

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  • Laser machining device of annular micropore and laser machining method of annular micropore
  • Laser machining device of annular micropore and laser machining method of annular micropore
  • Laser machining device of annular micropore and laser machining method of annular micropore

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Effect test

Embodiment 1

[0040] S1: Set up a laser processing device with annular micro-holes: adjust the pulse laser 1, polarization control system 2 and scanning galvanometer 4 to be in the same optical axis center; At the focal point; the pulsed laser 1, the focusing lens 6, the three-dimensional moving platform 10 and the computer control system 11 are electrically connected. Among them, the precious metal nanoparticle material is gold; the laser used is IPG series pulsed fiber laser, the center wavelength is 1064nm, the repetition frequency is adjustable from 10KHz-100KHz, the spot diameter is 50μm, and the maximum pulse energy is 1mJ;

[0041] S2: Select workpiece 9, the material is titanium alloy, the size is 20mm*20mm*5mm, and its damage threshold is J 0 =30.5mJ / cm 2 ;Preprocess the surface of workpiece 9: the roughness is 120, 600, 1200, 3000 mesh sandpaper to polish the surface of the titanium alloy to remove obvious scratches on the surface; use anhydrous ethanol as a solvent to clean the ...

Embodiment 2

[0049] It is required to process the inner diameter of the annular micro-hole d=20nm, at this time p=10, which satisfies op Figure 5 , according to the obtained energy enhancement characteristic curve, determine the energy enhancement multiple A d = 24.5. Turn on the computer control system, the spot diameter of the known laser beam is 50μm, the calculated laser energy is selected as 0.019mJ, the repetition frequency is set to 50KHz, and the scanning speed is set to 25m / s. Other processing steps and parameters are the same as in Example 1.

[0050] Using scanning electron microscope to observe the processed annular micropores, it is found that the average inner diameter d of the processed annular micropores is 18.78 nm, which is in good agreement with the processing requirements.

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Abstract

The invention provides a laser machining device of an annular micropore. The laser machining device of the annular micropore comprises a pulse laser, a polarization control system, a scanning mirror, an aperture, a focusing lens, a confinement layer, single-layer nano-particles, a three-dimensional moving platform and a computer control system. The pulse laser, the polarization control system and the scanning mirror are distributed along the same optical axis center in order. The aperture and the focusing lens are arranged right below the scanning mirror and the three-dimensional moving platform is arranged right below the focusing lens. The pulse laser, the focusing lens and the three-dimensional moving platform are connected with the computer control system. The creating of the annular micropore is realized in the way of depositing the single-layer nano-particles on the surface of a workpiece by the pretreatment of the surface of the workpiece, then determining the energy strengthening multiple, and machining the surface of the workpiece by the output energy of the pulse laser. According to the device, the laser machining of the annular micropore can be realized. The device has the characteristics of being high in accuracy, controllable in size, high in machining efficiency, simple in equipment and like.

Description

technical field [0001] The invention belongs to the field of laser processing, in particular to a laser processing device and method for annular microholes. Background technique [0002] The advancement of industrial technology has led to the rapid development of laser processing technology, among which laser drilling is the earliest laser processing technology to achieve practicality. Due to the advantages of fast speed, high efficiency and good economic benefits, laser drilling has become one of the main application fields of laser processing. [0003] Laser drilling technology uses a high-power-density laser beam to irradiate the target, so that the temperature of the target surface quickly rises to the vaporization temperature, and evaporation forms holes. A single laser beam can only form one hole. However, when laser drilling technology is applied in the field of micro-nano processing, it faces many problems. The main points are: ① Microholes cannot be made in a larg...

Claims

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Application Information

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IPC IPC(8): B23K26/382B23K26/082B23K26/0622B23K26/04B23K26/70
CPCB23K26/04B23K26/0622B23K26/082B23K26/382B23K26/702
Inventor 佟艳群石琳任旭东张永康吴笑漪黄建宇王昭周武超
Owner JIANGSU UNIV
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