The application discloses a method for fine modification of the interior of a
crystal based on double-
beam laser focus interference, and belongs to the field of
laser precision
machining. The method is realized by adjusting the
divergence angle of double beams by using a
laser shaping device to realize the overlap of focus A and focus B. The double foci overlap and interfere, and the
interference phenomenon of the
energy intensity alternately changing occurs in the focus overlap area; under the interference,
laser energy is concentrated to the interference enhancement position, and the energy
peak value can exceed the modification threshold of the material interior, and modification occurs; the size of the double-focus overlap area is compressed relative to the conventional single-
focus area, and the modification by interference only occupies a part of the overlap area, and the size of the modification area is further compressed. Compared with the conventional single-focus modification area, the longitudinal size of the modification by the method can be compressed by at least 50%, and the precision of the micro-nano structure in the processed
crystal is higher. According to the characteristics of the
crystal material, laser parameters are selected, and scanning is carried out according to a preset track, modification points form a modification line, and then high-precision
machining of a complex micro-nano structure in the crystal can be realized.