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Ultrahigh precision processing method for meter-scale optical element

A technology of optical components and processing methods, applied in optical surface grinders, metal processing equipment, manufacturing tools, etc., can solve the problem of unstable properties of magnetorheological fluids, and it is difficult to achieve ultra-high-precision processing of meter-scale optical components and processing time. long-term issues

Active Publication Date: 2014-04-02
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

[0004] A lot of research has been done on magnetorheological polishing at home and abroad. In China, Changchun Institute of Optics and Fine Mechanics, Harbin Institute of Technology and National University of Defense Technology have conducted research on magnetorheological polishing, but it can only be used in smaller For optical components, there is no processing method for large-aperture planar meter-scale optical components
However, if the method of processing small workpieces is used to process meter-scale optical components, because the processing time is too long, the properties of the magnetorheological fluid will be unstable, which will easily lead to unexpected defects on the surface of large-caliber meter-scale optical components, which is very likely It is difficult to achieve ultra-high precision processing of meter-level optical components

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  • Ultrahigh precision processing method for meter-scale optical element

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Embodiment 1

[0026] An ultra-high-precision processing method for a meter-level optical element, the processing steps of which are as follows:

[0027] 1) Ring polishing:

[0028] Use a ring polishing machine to pre-process the meter-level optical components, and use a Φ300mm interferometer to measure the PV value of the surface shape accuracy of the meter-level optical components during the processing until the surface shape accuracy of the meter-level optical components is less than 1 wavelength;

[0029] 2) Magnetorheological processing:

[0030] ①Set the polishing parameters of the magnetorheological machine tool: the speed of the polishing wheel is 180r / min, the magnetic field current is 7A, the viscosity of the magnetorheological fluid is 193.0Pa·s, the flow rate is 120L / h, the bottom of the polishing wheel is at the level of meters The distance between the upper surface of the optical element is 1.05mm;

[0031] ② Calibrate the removal efficiency of magnetorheological fluid:

[...

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Abstract

The invention discloses an ultrahigh precision processing method for a meter-scale optical element. According to the method, an annular polishing technology and a magneto-rheological polishing technology are combined, and different processing technical parameters are subjected to optimal combination to realize the ultrahigh precision processing of the meter-scale optical element. According to the method, the meter-scale optical element of which the PV (pageviews) value of surface figure accuracy is 1 / 8 wavelength and the RMS (rate-monotonic scheduling) value is 1 / 50 wavelength is processed.

Description

technical field [0001] The invention belongs to the processing of meter-level optical elements, in particular to an ultra-high-precision processing method for meter-level optical elements. technical background [0002] With the rapid development of modern science and technology, higher and higher requirements are put forward for meter-scale optical components used in various optical systems. Usually, the meter-level optical components produced in the end are required to have high surface shape accuracy. High surface shape accuracy can ensure good imaging quality, reduce scattering, and avoid damage to meter-level optical components in high-energy applications. Therefore, the performance of meter-scale optical components depends largely on the manufacturing process. A variety of processing methods have been studied to obtain high-precision processing surfaces. Typical processing methods include plastic grinding, chemical polishing, float polishing, elastic emission processi...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B1/00
CPCB24B1/005B24B13/00
Inventor 魏朝阳顾昊金程鑫易葵邵建达
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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