Annular polishing surface shape accurate adjustment method for plate type optical components

A kind of optical and polishing surface technology, which is applied in the direction of optical surface grinder, grinding/polishing equipment, manufacturing tools, etc., can solve the problems of unguaranteed, single-sided surface shape accuracy difference, etc., and achieve high controllability, high adjustment accuracy, The effect of improving the qualified efficiency of surface shape

Active Publication Date: 2018-06-19
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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AI Technical Summary

Problems solved by technology

When the surface shape of the polished die is in the conformal period, the reflected or transmitted wavefront of the processed workpiece cannot be guaranteed to be qualified, especially t

Method used

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  • Annular polishing surface shape accurate adjustment method for plate type optical components
  • Annular polishing surface shape accurate adjustment method for plate type optical components
  • Annular polishing surface shape accurate adjustment method for plate type optical components

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0037] The φ4.4m ring polishing machine is used to process the neodymium glass element with a size of 810mm*460mm*40mm, and the rotating speed of the polishing disc can be adjusted in the range of 0-0.5r / min. The processing environment temperature is 22±0.1°C, the relative humidity is 65-70%RH, cerium oxide is used as the polishing liquid, the concentration is 4%, and the flow rate is 0.8L / h. The transmission wavefront index of the component requires PV to be better than 1 / 3λ, and GRMS to be better than 1 / 90λ. The processing steps are as follows:

[0038] Step 1) Polishing mold modification:

[0039] Keep the process parameters such as ambient temperature and humidity, polishing liquid concentration / flow rate unchanged, adjust the speed of the polishing disc to 0.25r / min, and modify the shape of the polishing mold by changing the eccentricity of the correction disc. During the modification process, the φ600mm plane interferometer is used to measure the surface shape of the el...

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Abstract

The invention discloses an annular polishing surface shape accurate adjustment method for plate type optical components. According to the annular polishing surface shape accurate adjustment method forthe plate type optical components, the variation of reflection/transmission surface shapes is adjusted by using the thermal deformation of the plate type optical components during the course of annular polishing and accordingly the rapid and controllable conversion of the heights of the surface shapes of the components can be made during the surface shape preserving period of a polishing mould, so that the annular polishing reflection/transmission wavefront distribution control efficiency of the plate type components can be greatly improved. The method is particularly applicable to the platetype optical components which are large in thermal expansivity and prone to deform, such as laser neodymium glass sheet-shaped components with the caliber of 400 mm, so that the uncertainty of surfaceshape control can be effectively overcome during the annular polishing course of the plate type components, the machining accuracy of the meter-scale plate type optical components can be realized, the surface shape PV is superior to 1/5 lambda (lambda=632.8 nm) and GRMS is superior to 1/90 lambda.

Description

technical field [0001] The invention belongs to the field of optical cold processing, and in particular relates to a method for controlling the annular polishing surface shape of flat optical elements. Background technique [0002] Compared with small tool CNC machining technology, ring polishing technology (ring polishing) can perform full-diameter polishing on the entire surface of the workpiece, with high control precision of medium and high frequency indicators, and can take into account both polishing efficiency and quality, and has become the first choice for processing high-precision planar optical components. First choice. [0003] The ring polishing system usually consists of a calibration disc, a polishing die, a workpiece and a workpiece ring. Common ring polishing equipment mainly includes a marble polishing disc driven by a motor, and a layer of uniform polishing mold is poured on the upper surface of the polishing disc, and a hole is opened in the middle of th...

Claims

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Application Information

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IPC IPC(8): B24B1/00B24B13/00
CPCB24B1/00B24B13/00
Inventor 杨明红邵建达张弛豪吴伦哲徐学科
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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