Rapid super-resolution detection device and detection method for optical element defect based on random phase shift

Abstract

The invention discloses a random phase shift-based optical element defect rapid super-resolution detection device and method. The device is characterized in that a laser light source is equally divided into two beams through a 1*2 optical fiber coupler I, one beam is subjected to laser polarization state adjustment through an extrusion type polarization controller, and is equally divided into two beams through a 1*2 optical fiber coupler II, the other beam of laser output by the 1*2 optical fiber coupler I is equally divided into two beams by a 1*2 optical fiber coupler III, the four beams of illumination laser are symmetrically irradiated on the surface of a sample through an entrance pupil of a microscope objective for interference to form illumination light with a two-dimensional cosine structure, the microscope objective is used for receiving reflected and scattered light of the structured illumination light modulated by the surface of the sample, and final returned imaging signal collection is completed in a high-speed camera through an imaging lens. According to the invention, the purposes of miniaturization, portability, high efficiency, random phase shift and low cost are achieved.

Description

technical field [0001] The invention relates to the field of optical element detection, in particular to a random phase-shifting optical element defect fast super-resolution detection device and detection method. Background technique [0002] With the continuous development of ultra-precision machining technology and the application of advanced surface treatment technology, the effective detection and control of micron-scale large-scale defects can now be realized, and the damage threshold of optical components has been greatly improved, but compared with the intrinsic threshold of materials Still about an order of magnitude different. Compared with large-scale defects, micro-nano-scale high-threshold defects are the key factors that limit the further improvement of the damage resistance of optical components. At present, the methods used for surface defect detection of optical components mainly include microscope method, optical scattering method, interference method, lase...

AI Technical Summary

Problems solved by technology

[0004] 1. The interferometric structured light illumination super-resolution system based on SLM, in order to avoid the 0th order diffraction effect of SLM, has strict restrictions on the laser beam incident on the SLM (<10°), and most of the optical paths adopt "Z" arrangement, This makes the system bulky and difficult to compress, which greatly limits its industrial integration and embedding

[0005] 2. The SLM-based interferometric structured light illumination super-resolution system, by loading multi-directional and multi-phase phase gratings in the SLM, realizes multi-directional structured lighting modulation on the sample, which is limited by the loading frequency of the SLM (about 100 Hz) , leading to low efficiency of the system in the process of multi-directional, multi-phase modulation and large image acquisition

[0006] 3. Limited by the influence of the laser polarization state, in order to achieve multi-directional, high-contrast structural illumination modulation on the sample, phase gratings in different directions are usually loaded on the SLM in time-sharing, the detection efficiency is low, and it is not convenient for larger apertures. Optical component inspection

Images