In-situ high and low frequency fatigue double-inclined sample rod of transmission electron microscope

A technology of electron microscope and sample rod, which is applied in the direction of circuits, discharge tubes, electrical components, etc., can solve the problems that the maximum tilt angle cannot exceed ±30, the sensor stage is too large, etc., and achieve simple structure, small size, and accuracy high effect

Active Publication Date: 2016-10-05
ZHEJIANG UNIV
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  • Abstract
  • Description
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  • Application Information

AI Technical Summary

Problems solved by technology

[0012] In order to overcome the inability of the existing sample holder to realize the Y-axis (i.e. axis) tilting, or the sensor stage is too large to cause the maximum tilting angle to be difficult to exceed ±30 o disadvantages, the present invention provides a method that can realize the sample in The maximum tilt angle of the shaft exceeds ±30 o In Situ High and Low Frequency Fatigue Double Tilt Sample Stems for Transmission Electron Microscopy

Method used

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  • In-situ high and low frequency fatigue double-inclined sample rod of transmission electron microscope
  • In-situ high and low frequency fatigue double-inclined sample rod of transmission electron microscope
  • In-situ high and low frequency fatigue double-inclined sample rod of transmission electron microscope

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Embodiment Construction

[0033] Such as Figure 5 As shown, the in-situ high-low frequency fatigue double-tilt sample rod of the transmission electron microscope mainly includes a handle 5, a sample rod shaft 4, a sample rod head 1 and a sample loading platform 2 for loading samples. The sample loading platform 2 and The b-axis 9 is fixed, The shaft is rotatably mounted on the 4 head ends of the sample rod. The signal interface of the sample rod 4 is arranged on the handle 5 .

[0034] Such as Figure 6 As shown, the sample loading platform 2 is mainly composed of two loading parts A1, A2 and a connecting part 15. The loading parts A1 and A2 are symmetrically fixed at both ends of the connecting part 15. There is a gap between the two loading parts A1 and A2 that allows them to interact with each other. close to or away from the deformation gap C; each loading part includes its own Shaft 9, fatigue loading member 14 and sample holder 13, The shaft 9 and the fatigue loading member 14 are respec...

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Abstract

An in-situ high and low frequency fatigue double-inclined sample rod of a transmission electron microscope provided by the invention mainly comprises a holding handle, a sample rod, a sample rod head and a sample loading table. The sample loading table is mainly composed of two loading portions and two connection portions, the loading portions are symmetrically fixed at two ends of the connection portions, a deformation gap is located between the two loading portions and configured to permit the two loading portions to be mutually close to each other or far away from each other; each loading portion includes a [Beta] shaft, a fatigue loading piece and a sample clamping piece; the sample rod head is arranged with a driving piece, the driving piece is tightly contacted with the [Beta] shaft; when the driving piece is moved from the first position to the second position, the [Beta] shaft steps to an angle stroke [Theta]; and when the driving piece is reset from the second position to the first position, the [Beta] shaft is fixed; and the driving piece is moved from the first position to the second position and reset from the second position to the first position to form a movement period, the rotation angle of the [Beta] shaft is equal to N*[Theta], wherein N is the number of the movement period. According to the invention, the maximum inclination angle of the sample on the [Beta] shaft can exceed +- 30 degrees.

Description

technical field [0001] The invention relates to components of a transmission electron microscope, in particular to a biaxial tilting sample rod for a transmission electron microscope. technical background [0002] Transmission Electron Microscope (hereinafter referred to as TEM) is a large-scale experimental device for characterizing the microstructure of materials. It can simultaneously analyze the microstructure, crystal structure, and constituent elements of materials. The imaging principle is that the high-energy electron beam penetrates the sample, the transmitted electron beam is focused and amplified, and the detector is used to collect the signal and form an image. Modern high-resolution transmission electron microscopes can usually achieve atomic-level resolution, especially the rapid development of spherical aberration correction technology in the past five years makes the limit resolution of TEM reach 50 pm. However, it is often difficult to reach the limit resol...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/20G01N23/04
Inventor 王宏涛刘嘉斌
Owner ZHEJIANG UNIV
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