Ferroelectric film and manufacturing method thereof
A technology of ferroelectric film and total content, applied in chemical instruments and methods, manufacturing/assembly of piezoelectric/electrostrictive devices, circuits, etc., can solve problems such as inability to obtain sufficient characteristics, achieve excellent life reliability, Life-enhancing effect
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[0073] Next, the embodiments of the invention of the present application will be described in detail in conjunction with comparative examples.
[0074]
[0075] By the method described in Patent Document 1, lead acetate trihydrate (Pb source), lanthanum acetate (La source), tetraisopropoxytitanium (Ti source), tetrabutoxyzirconium (Zr source) ) was highly purified by repeated recrystallization from ultrapure water twice, and was used as a precursor. The precursors were weighed so that the metal atomic ratios Pb / La / Zr / Ti became 110 / 3 / 52 / 48, and these were added to propylene glycol in the reaction vessel to prepare a synthesis solution. After the synthesis liquid was refluxed at a temperature of 150° C. for 60 minutes in a nitrogen atmosphere, the solvent was removed by distillation. Thereafter, acetylacetone was added as a stabilizer, and the mixture was refluxed at 150° C. for 60 minutes.
[0076] Next, by adding propylene glycol to the above synthesis liquid, the total co...
Embodiment 2～9、 comparative example 1～4
[0081] As described in Table 1, ferroelectric films were formed in the same manner as in Example 1 except that various conditions were changed. Specifically, in some embodiments, the film thickness of the fired film is changed by adjusting the rotational speed and time of the spin coater. Furthermore, in some embodiments, the number of repetitions of the process (firing times) and the film thickness of the ferroelectric film are changed. In some examples and comparative examples, liquid compositions having different concentrations of Li and the like were used by changing the number of times of high purification by recrystallization. In some comparative examples, the wind speed in the preliminary sintering process was changed. In Example 9, the metal atomic ratio Pb / La / Zr / Ti of the precursor was set to 110 / 0 / 52 / 48.
[0082]
[0083] For the ferroelectric films formed in Examples and Comparative Examples, the total concentration of Li and the like in the film, the concentrat...
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Abstract
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