Airtight packaging structure of quartz flexible accelerometer

Abstract

The invention discloses an airtight packaging structure of a quartz flexible accelerometer. The airtight packaging structure comprises a sensitive device, a shell, a servo circuit, a sealing cover and a glass insulator tube shell. The sensitive device is arranged in the sealing cover through epoxy glue. The opening part of the sealing cover is sealed by the glass insulator tube shell. The sealing cover, the glass insulator tube shell and the sensitive device jointly form a sensitive meter head. The sensitive device is fixedly arranged in the shell in the form of the sensitive meter head based on the gelatinization joint technology. The output lead of the sensitive device is connected with a servo circuit through pins on the glass insulator tube shell. Based on the packaging structure, the reliable and stable operation of an accelerometer in the low-pressure (or vacuum) environment and in the electromagnetic radiation environment for a long time can be ensured. Meanwhile, the structure is simple to manufacture and mature in process. The precision and the reliability of the accelerometer in satellite or other space application environments are effectively improved.

Description

technical field [0001] The invention relates to the improvement of the structure of the accelerometer, specifically refers to the airtight packaging structure of the quartz flexible accelerometer. The packaging structure broadens the application field of the quartz flexible accelerometer, and is especially suitable for navigation, guidance and control of satellites or other aerospace and space vehicles A quartz flexible accelerometer is used, belonging to the field of quartz flexible accelerometers. Background technique [0002] Quartz flexible accelerometer is a force balance pendulum accelerometer with good stability, high precision, simple structure and easy miniaturization. , Guidance and control systems are the most widely used type of accelerometer. [0003] Quartz flex accelerometers use air film damping to adjust the damping of the accelerometer. Once the sensitive device structure is determined, its air film damping is determined by the density of the air. After ...

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Problems solved by technology

[0006] 1. Since the sensitive device is not in an airtight packaging structure, it will work in a low-pressure or vacuum environment for a long time, and the air leakage inside the sensitive device will cause changes in the parameters of the accelerometer and unstable performance;

[0007] 2. Without magnetic shielding measures, the output of the accelerometer is easily disturbed by the external magnetic field, and the measurement error increases

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