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Optical grating ruling machine and ruling system therefor

A technology of a grating scribing machine and a driving system, which is applied in the field of gratings, can solve the problems affecting the economic benefit of gratings, long grating development time, and many scribing times, so as to improve the scribing efficiency, shorten the development time, and reduce the scribing times. Effect

Inactive Publication Date: 2016-11-02
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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AI Technical Summary

Problems solved by technology

For the development of grating masters with the same scribe line density and different scribe areas, gratings with high requirements for groove grooves and difficult to replicate, and gratings with strict requirements for grating indicators and low pass rate for scribing, etc., the existing single tool post scribing The number of markings required by the system is large, the development time of the grating is long, and the efficiency is low, which in turn affects the economic benefits of the grating

Method used

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  • Optical grating ruling machine and ruling system therefor
  • Optical grating ruling machine and ruling system therefor

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Embodiment Construction

[0028] The core of the present invention is to provide a scoring system of a grating scoring machine to improve the efficiency of scoring. Another core of the present invention is to provide a grating scribing machine having the above-mentioned grating scribing machine scoring system.

[0029] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.

[0030] Such as figure 1 with figure 2 As shown, the present invention discloses a scoring system for a grating scoring machine, which includes a sliding ...

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Abstract

The invention discloses a ruling system for an optical grating ruling machine. The ruling system comprise a support rack, a sliding sleeve, a guide rail and a driving system, wherein the sliding sleeve is provided with at least two groups of cutter frames that can slide on the guide rail in a reciprocating manner, and the driving system provides power support for reciprocating movement of the sliding sleeve. The ruling system disclosed in the application is provided with at least two groups of cutter frames for ruling at least two optical grating mother boards, ruling times can be reduced, optical grating manufacturing time can be shortened, and ruling efficiency can be improved. The invention also discloses the optical grating ruling machine equipped with the ruling system.

Description

Technical field [0001] The invention relates to the technical field of gratings, in particular to a grating scoring machine and a scoring system thereof. Background technique [0002] Diffraction grating is a kind of precision beam splitting element. Mechanical scribing method is one of the main methods for making diffraction grating. The principle is that grating scribing knife extrudes a series of equally spaced grating substrates coated with aluminum film or gold film. , Regular groove-shaped grating reticles, among which all echelle gratings and infrared gratings with low reticle density, etc., have strict requirements on groove type, groove depth and diffraction efficiency. The grating scoring machine for making machine-engraved gratings is mainly composed of an indexing system that drives the grating blank to move along a straight line and a scribing system that drives the diamond cutter to reciprocate. [0003] In the prior art, the scribing system of the grating scribing m...

Claims

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Application Information

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IPC IPC(8): G02B5/18
CPCG02B5/1852
Inventor 唐玉国糜小涛李晓天宋楠姚雪峰齐向东巴音贺希格
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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