Tri-axial plane alignment platform
A technology of alignment platform and axis plane, applied in the direction of workbench, manufacturing tools, etc., can solve the problems of large volume and insufficient alignment accuracy of alignment platform, achieve small size, reduce the limitation of use space, and improve alignment accuracy Effect
Inactive Publication Date: 2016-11-09
JIANCHENG TECH GUANGZHOU CO LTD
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Problems solved by technology
[0005] In order to overcome the deficiencies of the prior art, the purpose of the present invention is to provide a 3-axis planar alignment platform, which can solve the problems of insufficient alignment accuracy and large volume of the existing alignment platform
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[0022] In the following, the present invention will be further described in conjunction with the drawings and specific embodiments.
[0023] Piezoelectric motors (or ultrasonic motors, ultrasonic motors) use the reverse piezoelectric effect of piezoelectric materials, that is, piezoelectric ceramic materials are deformed under the action of an electric field to drive the movement of the motor's mover. According to the driving mode, piezoelectric motors can be divided into linear piezoelectric motors and rotary piezoelectric motors, and the piezoelectric motors used in the present invention refer to linear piezoelectric motors.
[0024] like image 3 As shown, the 3-axis planar alignment platform of this embodiment includes a base 1, a working surface 2, a first moving unit module 3, a second moving unit module 4, a third moving unit module 5 and a free axis unit module 6. The first mobile unit module 3, the second mobile unit module 4, the third mobile unit module 5 and the ...
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The invention discloses a tri-axial plane alignment platform. The tri-axial plane alignment platform comprises a base, a work table top, a first moving unit module, a second moving unit module and a third moving unit module. The work table top is supported by the moving unit modules. The first moving unit module, the second moving unit module and the third moving unit module each comprises a base plate, a lower supporting seat, a piezoelectric motor, a drive plate, an upper supporting seat and a supporting connection portion. The movement direction of each upper supporting seat is perpendicular to that of the corresponding lower supporting seat. The moving direction of the lower supporting seat of the first moving unit module and the moving direction of the lower supporting seat of the second moving unit module are identical. The moving direction of the lower supporting seat of the third moving unit module is perpendicular to the moving direction of the lower supporting seat of the first moving unit module and the lower supporting seat of the second moving unit module. The tri-axial plane alignment platform is high in alignment position and smaller and more exquisite in volume.
Description
technical field [0001] The invention relates to a precise control alignment device, in particular to an alignment platform capable of realizing X and Y direction translation and plane rotation. Background technique [0002] The 3-axis alignment platform is a platform that can translate in the X and Y directions and rotate around an axis perpendicular to the xy plane. It is widely used in optical inspection, silk screen printing, exposure, laminating processing and other fields. figure 1 It is a structural schematic diagram of an alignment platform in the prior art, such as figure 1 As shown, the alignment platform is composed of an X-axis translation stage 100, a Y-axis translation stage 101 and a rotation stage 102 stacked vertically, and each platform is driven by its own stepping or servo motor. Due to the size of the motor and each platform, such vertically stacked alignment platforms generally have a relatively high height, thus being limited in use in occasions with l...
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IPC IPC(8): B25H1/14
CPCB25H1/14
Inventor 江海
Owner JIANCHENG TECH GUANGZHOU CO LTD