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A kind of people counting sensor and manufacturing method thereof

A technology of counting sensors and manufacturing methods, which is applied in the direction of counting mechanisms/items, instruments, etc., can solve the problems of small space gap between personnel, many misjudgments, and low cost, so as to meet the requirements of large-scale production and installation, realize popular application, reduce The effect of applying costs

Active Publication Date: 2019-02-01
云南瑞博检测技术股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The implementation of the former is more complex, involving the application of image processing and intelligent recognition algorithms, and has higher requirements for video hardware and software. Due to cost reasons, it has not been able to be widely used on a large scale.
The cost of the latter is slightly lower, and the working mode is relatively simple. The infrared unit is used to judge the on-off of the tube and the direction of the on-off to judge the flow of people. However, in densely populated areas, the space gap between the people entering and leaving at the same time is small, resulting in misjudgment. more
[0005] There is also a people counting method with mechanical single-step rotation control on the market. This method will not cause misjudgment and can be linked with the toll system. However, it is used in post-paid applications that require the speed of people flow, such as restaurants and shopping malls. not applicable

Method used

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  • A kind of people counting sensor and manufacturing method thereof
  • A kind of people counting sensor and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] A. On the silicon substrate 1, 16 thermally insulating organic bosses 3 with a height of 10-100 um are produced by photolithography and development by spin coating;

[0033] B. The lower electrode 2 is made on the upper surface and side surface of each thermal insulation organic boss 3 and the upper surface of the silicon substrate 1 by photolithography stripping method, and the lower electrode 2 is made of CrAu alloy with a thickness of 100-300nm ;

[0034] C. Form a thin film layer 4 on the surface of the sample treated by step B by sputtering, and then partially corrode and remove the thin film layer other than the heat-insulating organic bosses by photolithography and development, wherein the thin film layer The surface area is 20% smaller than the upper surface area of ​​the heat-insulating organic boss, and the thin film layer 4 is made of PZT material;

[0035] D, adopt stripping method to prepare upper electrode 5 on the surface of described film layer 4, descr...

Embodiment 2

[0038] A. On the silicon substrate 1, 16 heat-insulating organic bosses 3 with a height of 10 um are produced by photolithography and development by spin coating;

[0039] B. The lower electrode 2 is made on the upper surface, side surface and upper surface of the silicon substrate 1 of each heat-insulating organic boss 3 by photolithography stripping method, and the lower electrode 2 is made of TiAu alloy with a thickness of 100 nm;

[0040] C. Form a thin film layer 4 on the surface of the sample treated by step B by sputtering, and then partially corrode and remove the thin film layer other than the heat-insulating organic bosses by photolithography and development, wherein the thin film layer The surface area is 20% smaller than the upper surface area of ​​the heat-insulating organic boss, and the thin film layer 4 is made of PZT material;

[0041] D, on the surface of the film layer 4, the upper electrode 5 is prepared by stripping, the upper electrode 5 is made of TiW al...

Embodiment 3

[0044] A. On the silicon substrate 1, 16 heat-insulating organic bosses 3 with a height of 100 um are produced by photolithography and development by spin coating;

[0045] B. The lower electrode 2 is made on the upper surface, side surface and upper surface of the silicon substrate 1 of each heat-insulating organic boss 3 by photolithography stripping method, and the lower electrode 2 is made of Cr with a thickness of 300nm;

[0046] C. Form a thin film layer 4 on the surface of the sample treated by step B by sputtering, and then partially corrode and remove the thin film layer other than the heat-insulating organic bosses by photolithography and development, wherein the thin film layer The surface area is 20% smaller than the upper surface area of ​​the heat-insulating organic boss, and the thin film layer 4 is made of PZT material;

[0047]D, adopt stripping method to prepare upper electrode 5 on the surface of described film layer 4, described upper electrode 5 adopts Ni ...

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Abstract

The invention discloses a people flow counting sensor and a manufacturing method thereof, comprising a silicon substrate and a plurality of pyroelectric units arranged on the silicon substrate, each of the pyroelectric units includes a heat-insulating organic boss, and is set The lower electrode on the upper surface and side surface of the heat insulating organic boss and the upper surface of the silicon substrate, the thin film layer arranged on the lower electrode, and the upper electrode arranged on the thin film layer. The people flow counting sensor provided by the present invention utilizes the characteristic that the pyroelectric unit only responds to moving targets, and prepares a people flow counting detection sensor with multiple pixels. The sensor itself has the functions of people counting and direction determination, without the participation of memory and CPU, reducing the requirements for auxiliary optical electromechanical equipment, and greatly reducing the application cost.

Description

technical field [0001] The invention belongs to the technical field of people flow counting devices, and in particular relates to a people flow counting sensor and a manufacturing method thereof. Background technique [0002] In today's fierce business competition, effective business management has become an important factor in the success or failure of business marketing. How to scientifically and effectively analyze passenger flow in time and space, and quickly and timely make business decisions has become a crucial role in the marketing model of commercial and retail industries, and improves the competitiveness of shopping malls. [0003] People flow statistics and counting can compare the passenger flow in different periods by counting the passenger flow at each entrance and exit of the mall, and can evaluate the rationality of marketing and promotion strategies; according to the change of passenger flow, it can more effectively allocate property management, maintenance ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G06M1/27G06M1/02
CPCG06M1/022G06M1/27
Inventor 黄鸿高俊饶敬梅董保志夏磊
Owner 云南瑞博检测技术股份有限公司