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Method for determining passivation quality of PERC battery back passivation film layer

A back passivation and passivation film technology, applied in circuits, electrical components, photovoltaic power generation, etc., can solve the problems of expensive testing equipment, only single-chip analysis but not batch analysis, so as to achieve no investment in fixed equipment and avoid batch abnormality. , the effect of improving the yield

Active Publication Date: 2016-11-09
WUXI SUNTECH POWER CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This method can only be analyzed on a single chip but not in batches, and the detection equipment is expensive

Method used

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  • Method for determining passivation quality of PERC battery back passivation film layer
  • Method for determining passivation quality of PERC battery back passivation film layer
  • Method for determining passivation quality of PERC battery back passivation film layer

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] AlO on the backside after PECVD plating x / SiN y Put the semi-finished PERC battery with passivation film into 4% HF solution by volume. The appearance and color of the semi-finished battery look completely normal. Expose half of the semi-finished battery to the air, and immerse the other half in the HF solution. The surface state of the silicon wafer in the battery changes, and when the reaction reaches 7 minutes, a "strip" color difference appears in the local area of ​​the surface of the battery semi-finished product (such as figure 1 The area A shown, below the dotted line is the area immersed in the HF solution), showing that the corrosion rate in the local area is too fast, and the corrosion rate in the local area is very slow, indicating that AlO x / SiN y The density of the passivation film varies greatly, although the appearance of the entire surface before corrosion looks the same, it is necessary to check the AlO x During the deposition process, whether th...

Embodiment 2

[0028] AlO on the backside after PECVD plating x / SiN y The semi-finished PERC battery with a passivation film layer is placed in a 4% HF solution by volume. Half of the semi-finished battery is exposed to the air and half is immersed in the HF solution. Observe the changes in the surface state of the silicon wafer immersed in the HF solution. At 4 minutes, a white "floc" appeared on the surface of the semi-finished battery, and the "floc" was a small piece of AlO that fell off. x / SiN y passivation layer, due to the AlO x / SiN y The density of the passivation film layer is poor, and the passivation film layer was corroded by HF in the HF solution and fell off, and the surface of the semi-finished product was completely dehydrated when it was corroded for 5 minutes, indicating that AlO x / SiN y The film density is very poor.

Embodiment 3

[0030] Will look normal but have black speckled shadows under the EL (eg figure 2 Shown) the finished battery corrodes the front and back electrodes, and corrodes the back film with 8% HF solution by volume. image 3In the area B shown, below the dotted line is the area immersed in the HF solution), the appearance of the shadow of the black spot changes after 3 minutes of corrosion, and it is completely dehydrated after 5 minutes of corrosion. The coating on the black spot is abnormal, and the coating process problem needs to be checked.

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Abstract

The invention relates to a method for determining the passivation quality of a PERC battery back passive film layer. The method is characterized in that the method includes the following steps: (1) sampling from one batch of battery semi-products for detection; (2) placing the sampled battery semi-products to a hydrofluoric acid solution having a volume percentage of 4-10 %, observing the corrosion of the passive film layer on the surface of the battery semi-product imposed by the hydrofluoric acid solution; if the surface of the battery semi-product is corroded at uniform speed and has no occurrence of regional aberration, floccule, or locally-appeared hydrophobicity, then the battery is qualified, or else the product is unqualified, and the batch of the battery semi-products are returned and reprocessed. According to the invention, the method can determine passiviation quality of the AIOx / SiNy lamination passive film in a rapid, efficient, easy and low cost manner.

Description

technical field [0001] The invention relates to a method for judging the passivation quality of PERC (passivated emitter backside contact) battery back passivation film, especially a method for quickly judging the passivation of passivated emitter and PERC battery back passivation film by chemical corrosion method. The method for improving the quality belongs to the technical field of crystalline silicon solar cell manufacturing. Background technique [0002] Improving conversion efficiency and reducing manufacturing costs have always been the two main lines of development of the photovoltaic industry. Among many photovoltaic cell technology routes, crystalline silicon cell technology has always occupied the largest market share, so improving the conversion efficiency of industrialized crystalline silicon cells has become a broad appeal of the industry. In recent years, with the continuous improvement of the quality of crystalline silicon materials and the technology of the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02S50/10H01L31/049
CPCY02E10/50H02S50/10H01L31/049
Inventor 陈丽萍乔琦陆红艳陈如龙
Owner WUXI SUNTECH POWER CO LTD
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