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A kind of compensation method and compensation system for box alignment accuracy

A precision compensation and alignment accuracy technology, which is applied in instruments, nonlinear optics, optics, etc., can solve problems such as compensation, elimination of alignment deviation, and reduction of alignment failure rate

Active Publication Date: 2019-06-04
BOE TECH GRP CO LTD +1
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  • Description
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Problems solved by technology

However, this method can only reduce the misalignment rate by adjusting the deviation, and cannot compensate this deviation to the color filter substrate manufacturing process or the array substrate manufacturing process, so it cannot fundamentally eliminate the alignment deviation

Method used

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  • A kind of compensation method and compensation system for box alignment accuracy
  • A kind of compensation method and compensation system for box alignment accuracy
  • A kind of compensation method and compensation system for box alignment accuracy

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Embodiment Construction

[0071] The specific implementation of the box accuracy compensation method and compensation system provided by the embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0072] The embodiment of the present invention provides a method for box accuracy compensation, such as figure 1 As shown, it may specifically include:

[0073] S101. Collect the identification data and measurement data of each batch of array substrates and color filter substrates and store them in a local database;

[0074] Among them, the measurement data includes the key position deviation value of each batch of the array substrate, the key position deviation value of each batch of color filter substrate, the key position deviation value of the black matrix on each batch of color filter substrate, and the difference between the array substrate and the color filter substrate. Alignment accuracy measurement value after film substrate alignment; ...

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Abstract

The invention discloses a box alignment accuracy compensation method and a compensation system. The box alignment accuracy compensation method calculates the exposure parameters of the black matrix process of the color film substrate in real time by using historical batch measurement data according to the measured deviation value of the key position of the array substrate Compensate the value, and feed back the compensation value to the production equipment in real time. The production equipment corrects the key parameters of the equipment in time according to the compensation value of the exposure parameter of the black matrix, thereby producing a color filter substrate that matches the array substrate. In this way, by predicting the alignment deviation between the color filter substrate and the array substrate, and optimizing the feedback compensation to the process to eliminate it, it can fundamentally solve the misalignment, improve product quality, save a lot of manpower consumption, and meet the needs of automated production lines. continuous production needs.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a method and system for compensating box accuracy. Background technique [0002] In the prior art, in the manufacturing process of liquid crystal displays, due to the difference in deformation of the substrates caused by the array substrate and the color filter substrate during the process, there will inevitably be alignment deviations in the cell alignment process, and the alignment deviations will It causes poor color crossing and poor light leakage, which has a great impact on the display effect of the product. In order to improve the product quality of liquid crystal display products, it is necessary to reduce alignment deviation as much as possible. [0003] At present, the way to reduce the alignment deviation in the prior art is generally to invest a large number of experimental substrates to measure the alignment accuracy, and then set the measurement results on the vac...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/1335G02F1/1333
CPCG02F1/1333G02F1/133512G02F1/133354G02F1/133514
Inventor 张小华白夏红闫冬雷昊
Owner BOE TECH GRP CO LTD
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