Light adjustment device and inter-substrate distance measurement method for light adjustment device
A technology of distance measurement and light adjustment, which is applied in the direction of using optical devices, measuring devices, apertures, etc., and can solve the problems of not being able to measure the space interval of blade parts and ensuring the accuracy of the space that cannot be easily confirmed.
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Embodiment approach 1
[0031] Figure 1 to Figure 10 Embodiment 1 of this invention is shown.
[0032] First, refer to Figure 1 ~ Figure 3 , the basic configuration of the light adjustment device will be described. here, figure 1 It is an exploded perspective view showing the basic configuration of the light adjustment device in the direction of the optical axis, figure 2 It is a perspective view showing the basic configuration of the light adjustment device, image 3 It is a sectional view showing the state of the space formed between the first substrate and the second substrate of the light adjustment device.
[0033] The light adjusting device is a device for adjusting light, and the adjustment mentioned here includes light amount adjustment and pupil adjustment by an aperture, light amount adjustment by an ND filter, light concentration adjustment by a lens, and polarization-based adjustment. The polarization adjustment of the optical filter, the wavelength band adjustment based on the co...
Embodiment approach 2
[0092] Figure 11 It is a figure which shows Embodiment 2 of this invention, and is a perspective view which shows the structure of a light adjustment device. In this second embodiment, the same reference numerals and the like are attached to the same parts as those in the above-mentioned first embodiment, and explanations thereof are appropriately omitted, and only differences will be mainly described.
[0093] In the above-mentioned first embodiment, the diameter of the second substrate 2 is set to be larger than the diameter of the first substrate 1, but in this embodiment, the diameter of the second substrate 2 is substantially the same as the diameter of the first substrate 1. A portion corresponding to the notch 1c protrudes the second substrate 2 in the radially outer direction to form a protruding portion 2d.
[0094] According to such second embodiment, substantially the same effect as that of the above-mentioned first embodiment can be obtained, and the size of the ...
Embodiment approach 3
[0097] Figure 12 and Figure 13 It is a figure which shows Embodiment 3 of this invention, Figure 12 is a perspective view showing the configuration of the light adjustment device, Figure 13 It represents the first substrate 1, the second substrate 2 and the spacer 3 in the light adjustment device Figure 12 13-13 sectional view of . In this third embodiment, the same reference numerals and the like are assigned to the same parts as those in the first and second embodiments described above, and explanations thereof are appropriately omitted, and only differences will be mainly described.
[0098] In the above-mentioned Embodiments 1 and 2, the first portion to be measured for measuring the distance from the first substrate 1 side to the spacer 3 is set on the first substrate 1, and is used to measure the distance from the first substrate 1 side. The second portion to be measured at a distance from the second substrate 2 is provided on the second substrate 2, but in this...
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