High-frequency photoconductive life tester with adjustable injection ratio and its testing method

Abstract

The invention discloses a high-frequency photoconductor life tester capable of regulating an injection ratio, and a test method thereof. The tester comprises a sample table, a test host, an industrial control computer and a display. During measurement, a to-be-tested sample is placed on an object carrying platform, the to-be-tested sample forms contact with two test electrode plates, and a laser beam emitted by an infrared laser is irradiated on the to-be-tested sample; in the test host, the input end of a programmable pulse light source driver is connected with the industrial control computer, the output end of the programmable pulse light source driver is connected with the infrared laser, the infrared laser is driven to emit the laser beam with a specific intensity and a wavelength, the output end of a high-frequency signal generator is connected with the first test electrode plate, and the second test electrode plate, a magnetic ring sampler, a digital peak detector, a broadband amplifier, a data collection card, the industrial control computer and the display are successively connected. According to the invention, the injection ratio is enabled to be stabilized at a set value, the problem of inconsistency of obtained life values, caused by inconsistency of injection ratios when the same semiconductor material crystal is measured by use of different devices is avoided, and misjudgement is reduced.

Description

technical field [0001] The invention relates to the field of carrier recombination life test research, in particular to a high-frequency photoconductive life tester and a test method thereof with adjustable injection ratio. Background technique [0002] In the production process of semiconductor materials and devices, almost all the production equipment used contain metals. Therefore, the pollution of heavy metals (mainly iron) to semiconductor materials is a common problem, which seriously affects the performance of semiconductor crystal materials. The carrier recombination life of semiconductor materials is one of the important parameters for evaluating the performance of semiconductor materials. It can sensitively reflect the content of heavy metals and directly detect the performance of materials and devices. Therefore, the carrier recombination life tester is a semiconductor Important quality inspection equipment for silicon single crystal, semiconductor devices, integr...

AI Technical Summary

Problems solved by technology

This makes it difficult to establish accurate and unified life test standards in the industry, which may lead to misjudgment, lower yields, increase production costs, and cause waste

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