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Medium time dependent dielectric breakdown testing device for parallel testing system

A time-dependent breakdown and testing device technology, which is applied to measuring devices, testing dielectric strength, and measuring electricity, can solve problems that affect the accuracy of TDDB test results, etc.

Inactive Publication Date: 2017-01-04
SHANGHAI HUALI MICROELECTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Before the last sample is broken down, it will be affected by the voltage drop when the first 15 samples are broken down, which will undoubtedly affect the accuracy of TDDB test results

Method used

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  • Medium time dependent dielectric breakdown testing device for parallel testing system
  • Medium time dependent dielectric breakdown testing device for parallel testing system
  • Medium time dependent dielectric breakdown testing device for parallel testing system

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Embodiment Construction

[0022] The specific embodiment of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0023] It should be noted that, in the following specific embodiments, when describing the embodiments of the present invention in detail, in order to clearly show the structure of the present invention for the convenience of description, the structures in the drawings are not drawn according to the general scale, and are drawn Partial magnification, deformation and simplification are included, therefore, it should be avoided to be interpreted as a limitation of the present invention.

[0024] In the following specific embodiments of the present invention, please refer to image 3 , image 3 It is a schematic diagram of the circuit working state of a dielectric breakdown test device used in a parallel test system according to a preferred embodiment of the present invention. Such as image 3 As shown, a time-lapse dielectric break...

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Abstract

The invention discloses a medium time dependent dielectric breakdown testing device for a parallel testing system. The device comprises multiple medium sample test branch units which are parallelly arranged in the circuit units powered by a same power supply, each of the medium sample test branch units is provided with a switch, an inductive element and a medium sample interface in series. When a test branch generates current instant increase due to the breakdown of a medium sample, the inductive element generates reverse voltage immediately, the voltage drop of other test branches caused by the current mutation of the branch can be prevented, thus the power supply has a certain relaxation time to detect the breakdown of the medium sample and disconnect the switch of the branch, the problem of the voltage fluctuation of two ends of other samples caused by the breakdown of one medium product firstly when the parallel testing system carries out a medium time dependent dielectric breakdown test can be avoided.

Description

technical field [0001] The invention relates to the technical field of wafer-level reliability testing, and more particularly, to a dielectric breakdown testing device suitable for a parallel testing system. Background technique [0002] see figure 1 , figure 1 It is a schematic diagram of a dielectric breakdown test circuit over time in an existing parallel test system. Such as figure 1 As shown, the parallel test system can test multiple samples at the same time, all samples are connected in parallel in a circuit powered by the same voltage and current source SMU (also called source measurement unit), and each parallel branch has an independent switch . When carrying out the dielectric time-dependent breakdown (TDDB) experiment, before the sample breaks down, the leakage current is low, so the sample can be considered as an ideal capacitor device. [0003] see figure 2 , figure 2 yes figure 1 A schematic diagram of the circuit state when a certain branch sample b...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R31/12
CPCG01R31/129
Inventor 吴奇伟尹彬锋周柯
Owner SHANGHAI HUALI MICROELECTRONICS CORP