Orthogonal degree adjusting method of photoelectric sensor of double-axis photoelectric autocollimator
A photoelectric autocollimator and photoelectric sensor technology, which is applied in the direction of instruments, optical devices, measuring devices, etc., can solve the problem of vertical adjustment of the two optical paths of the dual-axis photoelectric autocollimator. Dual-axis photoelectric autocollimator photoelectric sensor Orthogonality and other issues to achieve the effect of improving orthogonality, accurate test results, and ensuring verticality
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[0023] A kind of dual-axis photoelectric autocollimator photoelectric sensor orthogonal degree adjustment method proposed by the present invention is further introduced below in conjunction with the accompanying drawings and embodiments:
[0024] A method for adjusting the orthogonality of a photoelectric sensor of a dual-axis photoelectric autocollimator, comprising the following steps
[0025] Step 1, install the linear array CCD two-dimensional test device;
[0026] The device includes a Y-axis CCD1, an adjustment screw 2, a Y-axis differentiation plate 3, a Y-axis light source 4, an X-axis light source 5, an X-axis differentiation plate 6, an adjustment screw 7, an X-axis CCD8, three beam splitters 9 and a lens 10. Wherein, the X-axis light source 5, the X-axis reticle 6, the beamsplitter A12, the beamsplitter B9 and the lens 10 are optically coaxial, wherein the beamsplitter A12 and the beamsplitter B9 are located between the lens 10 and the X-axis reticle 6 , the adjust...
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