High-low-temperature vacuum leak hole calibration device and method

Abstract

The invention relates to a high-low-temperature vacuum leak hole calibration device and method, and belongs to the field of measurement. In the device, a standard vacuum leak hole is connected with a calibration room through a first valve; an air exhauster set is connected with the calibration room through a third valve; a calibrated vacuum leak hole is connected with the calibration room through a second valve, and is disposed in a high-low-temperature room; a mass spectrometer is connected with the calibration room; a vacuum gauge is connected with the calibration room; a temperature control board is disposed in the high-low-temperature room, and is connected with a temperature control system outside the high-low-temperature room. The method is implemented through the device, and obtains the leak rate of the calibrated vacuum leak hole. The method and device can achieve the accurate calibration of the leak rate of the vacuum leak hole under different temperature conditions, avoids a problem of bigger measurement uncertainty caused by that a vacuum leak rate is calibrated under a lab temperature condition and a standard flow is provided in different application environments in the prior art, and achieves the calibration of the vacuum leak rate under the actual application temperature of the vacuum leak rate.

Description

technical field [0001] The invention relates to a high and low temperature vacuum leak calibration device and method, in particular to a device and method for realizing precise calibration of vacuum leak rate within -50°C to +50°C, belonging to the field of measurement. Background technique [0002] In metrology laboratories, the calibration of vacuum leaks mostly uses standard leaks and high-precision gas micro-flowmeters to provide known gas flow rates, and compares them by measuring the leaked gas ion flow. When the comparison method, fixed conductance method, shunt method and static accumulation method are used for calibration, the calibration of the vacuum leak rate is carried out at the laboratory temperature (23 °C ± 3 °C). [0003] The literature "Li Detian, Li Zhenghai, Guo Meiru, et al. Development of ultra-high / very high vacuum calibration device. Journal of Vacuum Science and Technology 26(2), 2007." introduces a new method currently used to calibrate extremely h...

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Problems solved by technology

[0005] The disadvantage of the above method is that it focuses on the extension of the lower limit of the calibration and the reduction of the measurement uncertainty. The calibration of the vacuum leak rate is carried out at the laboratory temperature (23 ° C ± 3 ° C)

[0006] Vacuum leaks are calibrated under laboratory temperature conditions. Standard flow rates are provided at different ambient temperatures during use. Due to different temperatures, the working state of the leak and the gas state will change, resulting in the deviation of the leak rate value at the corresponding temperature point. Room temperature is used as the leak rate value at the calibration temperature, which introduces a large measurement uncertainty

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