Semiconductor heat treatment equipment technology door state detection device and detection method

Abstract

The invention discloses a semiconductor heat treatment equipment technology door state detection device, which comprises at least three buffers that are not in a same straight line and a detection unit. Buffers are fixed between the lower end surface of a technology door and a support disc. Each buffer comprises a sleeve, which is thoroughly arranged and fixed on the support disc and is provided with an opening in the top of the sleeve; a top column, which is arranged in the sleeve, wherein the top end surface of the top column protrudes the opening of the sleeve and is fixed to the lower end surface of the technology door, and the lateral surface of the top column is provided with axial scales; a spring, whose top is connected to the lower end surface of the top column; and a plug screw, whose upper end surface is connected to the bottom of the spring, and the lower end surface is fixedly connected to the lower end of the sleeve. When the technology door is lifted to the closing position of the technology door, the detection unit can rapidly and accurately detect the sealing state and / or levelness of the technology door according to the corresponding axial scales of the tops of the sleeves of the buffers.

Description

technical field [0001] The invention relates to semiconductor heat treatment equipment, in particular to a semiconductor heat treatment equipment process door state detection device and detection method. Background technique [0002] Semiconductor heat treatment equipment is semiconductor equipment that performs heat treatment processes such as oxidation and annealing on silicon wafers. Generally speaking, semiconductor vertical heat treatment equipment supports a quartz boat full of silicon wafers through the process gate, and performs various heat treatment processes on silicon wafers in the thermal reaction tube. Among them, the function of the process door is to close the heat reaction tube, to prevent the loss of heat energy in the heat reaction tube, and the leakage of process gas or the entry of external air. [0003] The levelness of the process door is the main index to measure the installation quality of the process door, which directly affects the sealing of the ...

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Problems solved by technology

[0004] When adjusting the levelness of the craft door, first pre-tighten the three springs according to past experience, and then rely on the level to adjust one by one. However, this method is very time-consuming for each installation and adjustment, and it is also very difficult to accurately ensure the levelness of the craft door.

In addition, since the buffer body does not have a ruler or any distance measuring tools, it is not convenient for real-time observation during installation and debugging

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