Automatic angle adjustment mechanism for interferometer, and angle control method thereof

Abstract

The invention discloses an automatic angle adjustment mechanism for an interferometer, and an angle control method of the automatic angle adjustment mechanism. The automatic angle adjustment mechanism comprises a clamp platform, wherein a clamp vertical plate base and a clamp vertical plate are arranged on the clamp platform, the clamp vertical plate base is fixedly connected on the clamp platform, the clamp vertical plate is connected on the clamp platform in a rotated manner, an elastic member used for driving the clamp vertical plate to rotate toward a deflection direction is connected between the clamp vertical plate and the clamp platform, a driving motor, an angle sensor and a control system are further connected on the clamp platform, the driving motor is used for driving the clamp vertical plate to rotate, the angle sensor is used for acquiring a rotating angle of the clamp vertical plate, and the control system is used for comparing the acquired rotating angle with a pre-input deflection angle so as to perform feedback adjustment control on a driving stroke of the driving motor. The automatic angle adjustment mechanism and the angle control method thereof replace the existing manual adjustment and comparison based on experience with automatic control and adjustment, and improve the efficiency and precision of angle adjustment.

Description

technical field [0001] The invention relates to an interferometer, in particular to an automatic angle adjustment mechanism for an interferometer and an angle control method thereof. Background technique [0002] Interferometry is a method of measuring height data through bright fringes produced by the optical path difference produced by the coherent properties between two beams of coherent light. The light is divided into two beams by the beam splitter prism, and the optical path difference between the reflected reference mirror and the returned light from the sample forms interference fringes. [0003] As a device for measuring the geometric parameters of the fiber optic connector end face, measuring the APC angle has always been the focus of testing. However, the existing adjustment methods are all manual adjustments. The angle is adjusted to the measurement state of APC through a displacement tool such as a differential head. However, this adjustment method will lead to...

AI Technical Summary

Problems solved by technology

However, the existing adjustment methods are all manual adjustments. The angle is adjusted to the measurement state of APC through a displacement tool such as a differential head. However, this adjustment method will lead to insufficient measurement stability and accuracy. Each adjustment needs to be checked, which is more efficient. Low

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