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Automatic angle adjustment mechanism for interferometer and its angle control method

An angle adjustment and interferometer technology, applied in the field of interferometers, can solve problems such as inaccuracy, insufficient measurement stability, and low efficiency, and achieve the effect of improving efficiency

Active Publication Date: 2019-12-06
深圳市维度科技股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the existing adjustment methods are all manual adjustments. The angle is adjusted to the measurement state of APC through a displacement tool such as a differential head. However, this adjustment method will lead to insufficient measurement stability and accuracy. Each adjustment needs to be checked, which is more efficient. Low

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  • Automatic angle adjustment mechanism for interferometer and its angle control method
  • Automatic angle adjustment mechanism for interferometer and its angle control method
  • Automatic angle adjustment mechanism for interferometer and its angle control method

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Embodiment Construction

[0046] An automatic angle adjustment mechanism for interferometer, see figure 1 , Including the fixture platform 1, the fixture platform 1 is provided with a fixture stand 2 fixedly connected to the fixture platform 1 and a fixture stand 3 rotatably connected to the fixture platform 1, the fixture stand 2 includes a through hole in the middle The vertical plate body 21, the bottom of the vertical plate body 21 is fixedly connected to the fixture platform 1, the top of the vertical plate body 21 is connected with a horizontal connecting plate 22, the horizontal connecting plate 22 is provided with a connecting plate rotating shaft 221, and the fixture platform 1 There is a platform shaft 11 coaxial with the connecting plate shaft 221 ( figure 2 Visible in), the fixture vertical plate 3 is located between the horizontal connecting plate 22 and the fixture platform 1, and its top is rotatably connected with the connecting plate shaft 221, and its bottom is rotatably connected with ...

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Abstract

The invention discloses an automatic angle adjustment mechanism for an interferometer, and an angle control method of the automatic angle adjustment mechanism. The automatic angle adjustment mechanism comprises a clamp platform, wherein a clamp vertical plate base and a clamp vertical plate are arranged on the clamp platform, the clamp vertical plate base is fixedly connected on the clamp platform, the clamp vertical plate is connected on the clamp platform in a rotated manner, an elastic member used for driving the clamp vertical plate to rotate toward a deflection direction is connected between the clamp vertical plate and the clamp platform, a driving motor, an angle sensor and a control system are further connected on the clamp platform, the driving motor is used for driving the clamp vertical plate to rotate, the angle sensor is used for acquiring a rotating angle of the clamp vertical plate, and the control system is used for comparing the acquired rotating angle with a pre-input deflection angle so as to perform feedback adjustment control on a driving stroke of the driving motor. The automatic angle adjustment mechanism and the angle control method thereof replace the existing manual adjustment and comparison based on experience with automatic control and adjustment, and improve the efficiency and precision of angle adjustment.

Description

Technical field [0001] The invention relates to an interferometer, in particular to an automatic angle adjustment mechanism for an interferometer and an angle control method thereof. Background technique [0002] Interferometry is a method of measuring height data by bright fringes generated by the optical path difference between two coherent beams. The light is divided into two beams by the beam splitting prism, and the optical path difference between the reflected reference mirror and the returned light from the sample forms interference fringes. [0003] As a device for measuring the geometric parameters of the end face of an optical fiber connector, measuring the APC angle has always been the focus of the test. However, the existing adjustment methods are manual adjustments. The angle is adjusted to the APC measurement state by displacement tools such as differential heads. This adjustment method will result in insufficient measurement stability and insufficient accuracy. Each...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01M11/00G01B9/02
CPCG01B9/02G01B9/02072G01M11/00
Inventor 周其
Owner 深圳市维度科技股份有限公司
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