Moving body measurement and initialization apparatus

Abstract

The invention discloses a moving body measurement and initialization apparatus used for measuring displacement of a moving body in an X direction, a Y direction and an R<z> direction and performing initialization resetting on the moving body; the moving body measurement and initialization apparatus comprises three two-dimensional measurement mechanisms, decoupling mechanisms arranged on the two-dimensional measurement mechanisms, and four initialization resetting mechanisms, wherein two the two-dimensional measurement mechanisms are positioned in the X direction of the moving body while the last the two-dimensional measurement mechanism are positioned in the Y direction of the moving body; each two-dimensional measurement mechanism comprises two mutually-perpendicular moving pairs and a rotary pair connected with the moving body; each decoupling mechanism is connected with the rotary pair and one of the moving pairs; and two initialization resetting mechanisms are positioned in the X direction of the moving body while the other two initialization resetting mechanisms are positioned in the Y direction of the moving body. By virtue of the moving body measurement and initialization apparatus, decoupling of the moving body in R<x>, R<y> and Z directions as well as the initialization resetting of the moving body can be realized, so that the measurement accuracy and the stability and the working efficiency of the measurement apparatus can be effectively improved.

Description

technical field [0001] The invention specifically relates to a measuring and initializing device for a moving body. Background technique [0002] With the development of lithography machine technology, the requirements for the precision, speed, acceleration and reliability of the workpiece table system are getting higher and higher. In order to realize the high-precision positioning of the exposure table and improve the exposure quality, the workpiece table needs the measurement system to provide accurate measurement results and isolate the vibration interference from the outside world to the exposure table. The greater the reaction force, the excessive reaction force will be fed back to the measurement system, affecting the measurement accuracy. Therefore, the existing workpiece table technology reduces or eliminates the impact on the measurement system during the long stroke movement of the workpiece table by installing a balance mass module. [0003] Such as figure 1 A...

AI Technical Summary

Problems solved by technology

In the existing planar two-dimensional measurement technology, interferometer measurement is used to achieve accurate measurement. However, this method requires the design of an optical path, which has a complex structure and high cost. Although the existing two-dimensional grating ruler measurement method has a simple structure, it requires high installation accuracy. , it is difficult to debug, and the measurement accuracy for larger-sized balance mass modules cannot be guaranteed

[0005] In response to the above problems, a planar motion measurement device and method have emerged. In this technology, three sets of one-dimensional relative grating ruler measurement components are used to complete X, Y and Rz measurements. This method is low in cost, easy to install and debug, but still There are the following three deficiencies: 1. When the roller in the measuring assembly moves linearly in the groove, the outer ring of the wheel will generate a large sliding friction force due to compression, which will accelerate the wear of the outer ring of the wheel and cause a gap between the wheel and the groove, thereby greatly Reduce the measurement accuracy; 2. It is impossible to realize the decoupling of the deviation in the Rx, Ry and Z directions caused by the assembly error of the parts when the balance mass module moves in the plane; 3. Since the balance mass module is at the mechanical limit position, the compensation motor cannot correct direction movement, resulting in the balance mass module can not be initialized, reducing the working efficiency of the measuring device

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