Phase Recovery Algorithm Based on Entrance Pupil Scan Modulation Epie

Abstract

The invention discloses an ePIE phase recovery algorithm based on entrance pupil scanning modulation. Based on a built entrance pupil scanning modulation overlapping imaging device, a variable-size rectangular box is adjusted to change the entrance pupil, and illumination light is modulated to get diffraction patterns under the condition that no to-be-tested sample is added and diffraction patterns under the condition a to-be-tested sample is added. An extended aperture is introduced to replace the actual aperture. Finally, the phase information of a to-be-tested sample is obtained using the ePIE algorithm twice. The ePIE phase recovery algorithm of the invention has such advantages as imaging without lenses, wide field, fast convergence, and high stability.

Description

technical field [0001] The invention belongs to the field of optical detection, and in particular relates to an ePIE phase recovery algorithm based on entrance pupil scanning modulation. Background technique [0002] Iterative phase recovery algorithms have been widely used to recover the image of the sample under test from the measured diffraction intensities. In recent years, traditional iterative phase recovery algorithms using lenses have made great progress. [0003] In order to get rid of the limitation of the lens, some improved algorithms have also been proposed, such as C.T.Putkunz et al., the scanning diffraction method proposed in the article "Atom-scale ptychographic electron diffractive imaging of boron nitrogen cones", and P. Thibault et al. in "Maximum- Likelihood refinement for coherent diffractive imaging"The maximum approximation method proposed in the article, these methods can reconstruct the phase information of the sample from a series of diffraction p...

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Problems solved by technology

However, little consideration is given to the diaphragm and entrance pupil, which can modulate the illuminating light

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